MTL: The Microsystems Technology Laboratories at MIT

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MTL The Microsystems Technology Laboratories at
MIT

• Prof. Martin A. Schmidt
• Massachusetts Institute of Technology

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Who are we?

• The Microsystems Technology Labs (MTL)
• An Interdepartmental Laboratory at MIT
• Strong Relations with the Microelectronics
  Industry
• Research and Education in Microsystems
• Circuit and System Design
• Microfabrication
• Some Numbers
• 25 Faculty
• 350 Students
• 35M Contracted Research

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MTL - The Facilities

• Integrated Circuits Laboratory
• Class 10 - 2800 sq.ft. (6")
• 1.25 micron CMOS baseline process
• Technology Research Laboratory
• Class 100 - 2200 sq.ft. (6")
• Flexible Process Environment
• Exploratory Materials Laboratory
• Class 1000 - 2000 sq.ft.
• Thin Film Process Facility
• IC Design Laboratory
• Foundry IC Processes

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MTL Technology A Tour of Scale
Transistors
Displays
Gyroscopes
Microengines
mm mm nm
Microchemical Plants
Connectors
Nanotips
Low Power IC
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Lamination of Extruded 2-D Shapes
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Opportunities

• Rapid 2-D Extrusion
• Plastics, Silicon, Ceramics
• First-Pass Success
• Process modeling and tool characterization
• Lower Cost
• Transition from semiconductor mindset to machine
  tool mindset
• Aligned Bonding of Chips
• Transition from optical to mechanical/chemical
• Self-assembly
• LEGO (A. Slocum)