Beamline 4.0.3 M301 Vessel - PowerPoint PPT Presentation

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Beamline 4.0.3 M301 Vessel

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Title: Beamline 4.0.3 M301 Vessel


1
Beamline 4.0.3 M301 Vessel MERLIN
Beamline November 1, 2006
2
Schematic Layout of 4.0.3
Area of review
0
3
Beamline 4.0.3
M301
4
M301 Specifications
Construction Spherical (R 485.2m 2)
internally cooled Glidcop, graphite
coating Substrate length 500mm Tangential
clear aperture 420mm Sagittal clear aperture
30mm Tangential slope error tolerance (rms) ?t
1.6µrad Sagittal slope error tolerance (rms)
?s 4.1µrad (10 smallest vertical source size
110eV) Deflection Angle 2.5 Mask tangential
full aperture 0.9mrad 8.37mm (so it just
clips beam and lights up) Mask sagittal full
aperture 30mm Motion (range/resolution) Ty
0.5mrad / 0.005mrad (mirror pitch/vessel
yaw) X 1mm / 0.01mm (inboard/outboard) (initial
alignment only or if beam shifts) Allow 4.0.1
beam to pass through unobstructed
5
M301 Vessel
Beam
M301 Stand
6
M301 Stand Only
TSP and Ion Pump can be in any 90 deg.
position Steel stand which can be filled
(columns) with Zanite for vibration damping Two
stages provide X/- .5 travel Vessel yaw
centered under aperture 1001 gearbox gives .125
microns/full motor step Rotary encoder and limit
switches
7
M301 Vessel
Stainless steel construction Welded box (five
plates) One removable flange with fixed mirror
mounting Wire seal (1.5 spacing, 3/8 bolts,
more conservative than Oxford design
(11.0.1?) Two 6 viewports to view entire mirror
surface Ion gauge, cathode, and valve located on
vessel top Camera to view aperture
8
M301 Flange Assembly
Four tooling balls for fiducialization 4.0.1 beam
passes 4mm from aperture Phosphor coated for
beam alignment (clips beam horizontally .5
mm) One piece OFHC copper tubing to cool Glidcop
aperture Aperture horizontal translation/roll
through set screws Aluminum wire seal on flange
or vessel Pins to align flange during assembly
9
M301 Mirror Cradle Assembly
Box beam has four coplanar lands, angled ribs for
stiffness, shear Angle bracket for initial setup
and redundant support if mirror slips (e.g.
earthquake) Mirror pulled against kinematic
supports through nut bars Kinematic grooves
aligned towards the center of the mirror Mirror
motion achieved through vessel translation/rotatio
n
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