Future

1
Future
Summary
MEMS Simulation and Modeling with SUGAR 1.1
Jason Vaughn Clark, Ningning Zhou, David Bindle,
James Demmel, Kris Pister
Berkeley Sensor and Actuator Center, University
of California at Berkeley. Free on the web at
http//www-bsac.berkeley.edu/cfm
ALGORITHMS
Transient analysis
Sensitivity analysis
Steady-state analysis
Static analysis
Spice-like environment
MODELS
Transformations
MEMS representation in SUGAR
Accelerating Frames
Electrostatic Gap
Thermal Expansion
Nonlinear beam model
Residual stress strain gradient
RESULTS