AFM-Based Nanofabrication with thin films

1
AFM-Based Nanofabrication with thin films
Determination of Force for Lithography
topography
friction
To achieve better lithography, force should
applied be between 8 and 9 v
2
AFM-Based Nanofabrication with thin films
Fabrication of A Nano-flower
topography
friction
Resolution of nano-flower is affected by the
steps of gold surface.
3
AFM-Based Nanofabrication with thin films
Fabrication of LSU Logo
topography
friction
? The size of each patterns is 200 x 150 nm.
4
AFM-Based Nanofabrication with thin films
Mickey Mouse Nanopatterns
topography
friction
? The size of each nanopatterns is 175 x 175 nm.
5
AFM-Based Nanofabrication with thin films
Arrays of Nanoscale Mickey Mouse
topography
friction
? The size of each nanopatterns is 125 x 125 nm.