VICOROB Research group at the Universitat de Girona

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VICOROBResearch group at theUniversitat de
Girona
FANIN Inspection System
VICOROB VIsió per COmputador i ROBòtica (Computer
Vision and Robotics Group) Institut
d'Informàtica i Aplicacions Departament
d'Electrònica, Informàtica i Automàtica Universita
t de Girona
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Microscope Adaptation
System components

• NIKON MM40
• Linear Camera 4096 pixel res.
• Parker MX80L high precision motorized linear
  stages

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Prototype Development (i)Reference
self-positioning
The scanning system is able of self-positioning
for a two-reference alignment.
Test structures used as aligment reference
Controller GUI
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Prototype Development (ii)Gross Reference
Detection
After self-positioning, the system is able to
refine the search by linear image superposition
to make a narrower window
A zoom on the test structure
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Prototype Development (iii)Fine Reference
Detection
The test structure is segmented and its centroid
is computed at subpixel accuracy
Test structure segmentation
This procedure repeats for the opposite test
structure and the crystal orientation is computed
Subpixel accuracy Centroid computation
The crystal position and orientation are
transformed to meet the crystal CAD design
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Prototype Development (iv)Open circuit detection
Detection examples

• Open circuit
• Short Circuit
• Ripped tracks