Title: Optical Beam Steering
1Optical Beam Steering
- Christina Carlsson, Chris Reardon,
- and Thomas Krauss
- St. Andrews University
- cc90_at_st-andrews.ac.uk
2Liquid Crystal VCSEL approach
- Steering angle 5 - 40
- Steering power µW (few V)
3Liquid Crystals
- Characteristics
- A rod-like molecular structure
- Tendency of the molecules to point along a common
axis - Strong dipole
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E0
Emax
4Liquid Crystals
- Liquid crystals are found to be birefringent, due
to their anisotropic nature.Which is due to the
alignment and the shape of the molecules.
Maximum angle is dependent on the Index
difference (Dn) Thickness of the cell (d) Width
of the pixel (w)
5Liquid Crystal Cell
ITO
E 0
Glass
SiO (alignment layer)
ITO Indium Tin Oxide (transparent and
conducting)
6Liquid Crystal Cell
7Liquid Crystal Cell
8Preliminary result
9Summary LC cells
- Next step a proper test of the cells
- Efficiency
- Angle
- Future optimisation
- Pixel dimensions
- Cell thickness
10Next integration step
11The VCSEL array approach
- Array of 9 VCSELs with integrated diffractive
optics
12The light source The VCSEL
- Properties
- Surface emitting
- On wafer testing
- Array integration (1D and 2D)
- Device size 10x10 ?m
- Threshold current lt 0.5 mA
- Output power few mWs
- Power efficiency 50
- Modulation bandwidth 10 GHz
- Low divergence circular beam
- (simplifies coupling to optical fibers)
VCSEL Vertical Cavity Surface Emitting Laser
13VCSEL Photolithography
UV-Light
After developing the sample
Mask
Photo- resist
14VCSEL Lift-Off
After developing the sample in Acetone
15VCSEL Mesa etch
Chemically Assisted Ion Beam Etching with Argon
and Chlorine gas
16VCSEL Resist removal
Reactive Ion Etching with Oxygen
17VCSEL Oxidation
Oxidation in the mirror
Oxidation with water vapour
Oxide aperture
Mesa
18Insulation and Gold Contacts
Si3N4
Gold
19Summary - VCSEL
- Continue testing insulation layers
- Optimising the dimensions
- Etch depth
- Oxidation aperture
- Gold thickness