Cleanroom Design

1
Cleanroom Design

• by
• Per Ohlckers
• Vestfold University College
• Web www.hive.no
• E-mail Per.Ohlckersathive.no

2
Outline

• Introduction
• Why do we need cleanrooms
• Basic requirements for cleanrooms
• Earlier
• Present
• Future
• Main Application Fields for Cleanrooms
• Microelectronics
• Biotechnology and related fields
• Other fields Microtechnology, electronics,
  hospital care, etc
• Basic Structures and Components of Cleanrooms
• Clean air
• Stable Room Temperature
• Clean water
• Chemicals including gases
• Vibration damping
• Equipments with infrastructure
• Working in cleanrooms
• Best practices

3
A typical cleanroom
4
Introduction

• Why do we need cleanrooms
• Basic requirements for cleanrooms
• Earlier Clean air, stable temperature, stable
  humidity, clean water, gases and chemicals,
  lighting, processing equipment, inspection and
  test equipment, room infrastructure, etc.
• High investments and operating costs.
• Present As earlier at better performance
  vibration control
• Investments and operating costs very high
• Future You would not want know
• Main Application Fields for Cleanrooms
• Microelectronics
• Biotechnology and related fields
• Other fields Microtechnology, electronics,
  hospital care, etc

5
Basic Structures and Components of Cleanrooms

• Clean air
• Overpressure
• Filters
• HEPA ( High Efficiency Particulate Air) filters
• Humidity Control
• Stable Room Temperature 22 -2 centigrades?
• Clean Water Filtered and deionized water
• Chemicals
• Equipment with infrastructure
• Aligners
• Ovens
• etc
• Working in Cleanrooms
• Best Practices

6
Clean room classification
7
Dust/particle sizes
8
Utilities (infra-structure)
9
Clean water
10
Laminar Air Flow
11
HEPA (High Efficiency Particulate Air) filter
12
Mechanical Vibration Control

• Submicron processing needs vibration control
• Typical requirements are
• Sorry, hopefully to be filled in later.

13
On-site vibration measurement spectra of the
stepper (g386.4 in./sec2).
14
Working in Cleanrooms

• Best Practices
• Cleanroom workers are dust generators
• Cleanroom gowning Bunny suit etc.
• Dos and Donts
• Possible health hazards should be taken seriously
  (but a good job for people with breathing air
  related health problems, like asthma.

15
Conclusions

• Cleanrooms are necessary for microtechnology
  production and prototyping
• Cleanrooms are complex structures
• Cleanrooms are very expensive to build and
  operate
• Cleanroom work is a skill that needs to be
  learned.
• Requirements for cleanrooms getting tougher and
  tougher as microtechnologies mature further