Cressington 208 HR Sputter coater

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Cressington 208 HRSputter coater
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Overview
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Argon On

• Check to see if the Argon tank (bottle) main
  valve is on.
• Do NOT turn the pressure adjust needle valve on
  the regulator.

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Argon On Number 2

• Normally the specimen chamber is left under
  vacuum.
• Open the inline valve on the argon line. This
  will vent the chamber. Give it a few seconds.

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Open Sample Chamber

• Open chamber by lifting the Target Assembly. Do
  not place your fingers on the target.

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Remove Glass Jar

• To load samples, remove the glass cylinder and
  place it on clean aluminum foil.

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Place samples in chamber

• The stage has a various holders for the different
  types of samples stubs
• Load samples on stage.

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Close Chamber

• Replace the glass jar making sure that the
  o-ring is clean.
• Close Chamber top (target assembly) making sure
  that the top is seated properly on the glass jar.
  
• DO NOT DROP THE TARGET ASSEMBLY, lift slightly
  and pull gently outward to fit top on jar.

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Power Up

• Flip the POWER toggle switch.
• The unit will start up in the AUTO mode.

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Move Shutter

• Move the shutter out of the way.
• The shutter is used for deposition onto thermally
  sensitive samples.

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Presets for AUTO Mode - 1

• Preset the deposition time by pressing the
  PAUSE/TEST button and adjusting the SET buttons
  in the TIMER/current area.

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Presets for AUTO Mode - 2

• Preset the plasma current by pressing the SETma
  button and adjusting the SET buttons in the
  TIMER/current area.

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Starting the Sputter Cycle

• Press the CYCLE/STOP button in the AUTO area
• This will start the sputter cycle.

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What does the Cycle Do?

• The Cycle mode will then
• Pump the chamber to 0.05 mbar
• Open argon flush then close
• Pump to 0.15 mbar
• Open argon flush then close
• Open leak valve
• Pump to 0.15 mbar
• Switch on HV
• Sputter at preselected current for preselected
  time/thickness

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Remove samples

• Lift the Target assembly.
• CAREFUL the glass jar may stick to the top
  O-ring. HOLD THE GLASS while lifting the target
  assembly.
• Remove samples

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Shutdown

• Replace glass jar
• Close lid (target assembly)
• Close inline valve on argon line
• Turn on Power and let chamber pump for a minute.
• Turn off Power
• Close Valve on top of Argon Bottle.

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Film Thickness Monitor (FTM)

• Coatings can also be deposited using the FTM.
• Density and Tooling factors currently in memory
  can be displayed by pressing the relevant button.

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FTM - 2

• To adjust a value, hold the button for 2 seconds
  until the period begins to flash. Scroll up or
  down with the arrow buttons.
• Zero resets the display to zero after a
  measurement

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FTM - 3

• To display the current FTM termination thickness,
  press TERMINATOR and hold for two seconds. To
  adjust use the arrow buttons.

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FTM Target Density
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FTM - Tooling Factor
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Other

• Cressington has a number of options.
• Multi targets
• Different size jars.
• Check with CAF personnel before using these.