forming the system of professional standards and independent quality ... Functions of the State. and regional administration bodies. within the liberal model: ...
Steric hindrance of precursors does not in increasing of film roughness. ... Steric hindrance of precursors in a ALD process reduces film growth rate, but ...
Effect of Oxygen Vacancies and Interfacial Oxygen Concentration on Local Structure and Band Offsets in a Model Metal-HfO2-SiO2-Si Gate Stack Eric Cockayne