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Grazingincidence mirror damage

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Title: Grazingincidence mirror damage


1
Grazing-incidence mirror damage
M. S. Tillack, J. Pulsifer, T. K. Mau UC San
Diego W. Kowbel MER Corp.
High Average Power Laser Program Workshop Naval
Research Laboratory Washington, DC December 5-6,
2002
2
Outline
  • Final optics integrated program plan
  • UV damage testing of mirrors in air
  • Damage testing in vacuum
  • Contaminated surface tests
  • Initial results with coated optics (in air)
  • Optical modeling update

3
Final Optics Phase I Goals
4
Final Optics 3-yr Program Plan
Key program elements I. Quantification of
damage threats II. Development of mitigation
techniques III. Fabrication and system
integration
I. Quantification of Damage Threats (lead
lab) A. LASER DAMAGE 1. Demonstrate stability
of mirror at grazing angles UCSD 2. Perform
damage tests in a controlled environment UCSD 3.
Test coated optics for adhesion and damage
threshold UCSD 4. Perform large scale (4x4)
optics testing NRL 5. Establish a database of
contamination resistance UCSD
5
Final Optics 3-yr Program Plan
I. Quantification of Damage Threats (lead lab)
B. RADIATION DAMAGE 6. X-ray damage testing
(XAPPER) LLNL 7. Neutron exposures ORNL 8.
Post-exposure optical testing LLNL 9. MDS
simulations of radiation damage LLNL 10. Ion
exposures ORNL 11. Ion threat modeling UCSD C.
MULTIPLE THREATS 12. Synergistic damage threat
assessment LLNL 13. Multiple damage effects
demonstration tbd 14. Provide optical modeling
to support experiments UCSD
6
Final Optics 3-yr Program Plan
II. Mitigation Techniques (lead lab) 1. Ion
mitigation assessment LLNL 2. Contaminant
mitigation assessment UCSD 3. Mitigation
demonstration LLNL/UCSD
7
Final Optics 3-yr Program Plan
III. Fabrication System Integration (lead
lab) 1. Screening of candidate fabrication
techniques tbd 2. Fabrication of Al-coated SiC
substrates MER 3. Fabrication of environmental
coatings PVD 4. Fabrication of large-scale
optics MER 5. Thermomechanical design UCLA 6.
Analysis and mitigation of deformations UCLA 7.
Mechanics and failure analysis UCLA 8. Surface
optimization (overcoats, preconditioning,
...) UCLA 9. Integration with target injection
system UCSD
8
A Compex 201 excimer laser and UV optics were
installed at UCSD
420 mJ, 1020 ns, 248 nm
9
Damage of 99.999 pure Al in air
100mm
previous data, 532 nm
248 nm, 1 shot, 40 J/cm2
  • UV light is more damaging than visible light
  • Higher photon energy
  • Interaction with smaller surface features
  • Single-shot damage appears well below the melting
    point

10
Damage appears to be correlated with grain
boundaries
100mm
50x
6400 shots, 6-15 J/cm2
10mm
pin-point damage sites glow white hot under
irradiation
500x
11
Slip lines are not seen with KrF light
Mirror 22, 6744 shots, 10-24 J/cm2
10mm
previous data, 532 nm
12
Surface preconditioning
  • Preconditioning was found to be important for
    removing surface contaminants and defects
  • During the first laser shot, we typically observe
    bright yellow emission, which disappears after
    3-5 shots
  • Applying a few low fluence, low rep-rate shots
    before long-term exposure is important to reach
    high damage threshold
  • e.g., in a test of two identical surfaces, one
    exposed to 10-24 J/cm2 without preconditioning
    was destroyed after 3 seconds at 10 Hz
  • All mirrors are now tested with preconditioning

13
The appearance of chemical reactions led us to
begin testing in vacuum
  • A small, fixed-geometry vacuum cell was built to
    perform initial scoping tests
  • Base pressure is 20 microns
  • Initial results show that the background gas
    matters, suggesting we should fabricate a larger
    multi-purpose vacuum chamber to continue testing

14
The morphology of damage in vacuum appears
different than in air
500x
1000x
10mm
  • Small surface features lead to characteristic
    blue flourescence after 450 shots at 10-20 J/cm2
  • Fluence level where defects appear is not much
    higher than in air, although catastrophic
    destruction was not observed
  • Damage is not visible to the naked eye in
    post-test inspection

15
Damage exhibits itself as grain boundary
extrusion shallow pitting
450 shots at 10-20 J/cm2
16
WYKO shows depth of pits is 100200 nm
17
Testing at low fluence was performed to establish
lower bound on damage
3500 shots in vacuum at 4-6 J/cm2
10mm
The surface survived without damage visible to
the naked eye, but clearly the surface quality of
our mirrors must be improved if we hope to
achieve 5 J/cm2 over 108 shots
18
An oil-contaminated surface was cleaned in 5-10
shots w/o evidence of damage
  • Initial shots caused explosive combustion of oil
  • After 5-10 shots at 6-15 J/cm2 the oil was
    completely cleaned from the beam footprint
  • Subsequent testing to 100 shots showed no
    evidence of damage

19
A mineral-contaminated surface exhibited similar
behavior
  • Initial shots exhibited benign (yellow) emission
    of light
  • After 5 shots at 6-15 J/cm2 the contaminant was
    cleaned from the beam footprint
  • Subsequent testing to 100 shots showed no
    evidence of damage

Laser footprint
20
Coated optics from MER
  • Mirror substrates are composed of functionally
    graded SiC foam. Subsequently a SiC slurry is
    applied, followed by CVI-SiC and a first layer of
    CVD SiC.
  • After initial polishing, one of two Al coatings
    is applied
  • 120 nm RT evaporation coating
  • 300 nm PVD coating applied by magnetron
    sputtering at 150C

21
MER PVD coating
  • Imperfect surface exposed to 5 J/cm2 in air
    (sample didnt fit into vacuum) for 1000 shots
  • No laser damage could be found anywhere on the
    surface

22
MER evaporation coating
  • Surface exposed to 5 J/cm2 in air for 6 shots
  • Immediate and growing damage observed

23
Optical modeling status
  • Previous results reported on dimensional defects
    (dgtl and dltl) and gross contamination
  • Kirchhoff scattering by non-Gaussian roughness
    under investigation
  • Local compositional defects divided into external
    vs. internal
  • Methods are under review to determine if a
    cost-effective approach exists for studying local
    compositional defects

24
Summary Conclusions
  • No evidence of a shallow angle instability has
    been observed
  • Irradiation at 248 nm exhibits much more severe
    environmental interactions, requiring us to test
    in vacuum
  • Cleaning by KrF light appears to be a very
    important effect.
  • Surfaces should be preconditioned
  • External contaminants may be tolerable!
  • For coated optics, damage resistance depends on
    the fabrication technique
  • Some types of defects appear tolerable
  • Our top priority is to obtain higher initial
    quality surfaces for further testing
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