Title: Nanofabrication and Characterization of nanosturcture Device Using Scanning Probe Microscope
1Nanofabrication and Characterization of
nanosturcture Device Using Scanning Probe
Microscope
2Contents
- Nanofabrication using SPM
- Nanostructure device characterization using SPM
- Current limitation and solution
3Nanofabrication Using SPM
- STM
- Field -evaporation
- AFM
- Field evaporation
- Scratching and pouncing
- Dip-pen
- NSOM
4Moving Atoms by STM(using Van der Waals Force)
D. M. Eigler and E. K. Schweizer, Nature 344, 524
(1990).
5Field Evapolation by STM
T. T. Tsong, Phys. Rev. B 44,13703(1991).
6Field Evapolation by STM
Sample Cleaved MoS2 TipTungsten tip Ordinary
operation condition 0.5V, 0.1nA Gap distance
0.5nm Pulsed voltage-5.5V, 70ms Linewidth0.32nm
S. Hosaka, H. Koyanagi, A. Kikukawa, Y. Maruyama
and R. Imura, J. Vac. Sci. Technol. B 12, 3
(1994)
7Scratching and pouncing
M. Wendel, S. Kühn, H. Lorenz, J. P. Kotthaus and
M. Holland , Appl. Phys. Lett. 65, 14(1994)
8Field Evaporation by AFM
S. Hosaka, H. Koyanagi, A. Kikukawa, Y. Maruyama
and R. Imura, J. Vac. Sci. Technol. B 12, 3
(1994)
9Field Evaporation by AFM
Sample1.7nm SiO2 on top of Si TipSiO2 probe
with gold coating Pulsed Voltage-30V, 5ms Dot
diameter50-20nm
S. Hosaka, H. Koyanagi, A. Kikukawa, Y. Maruyama
and R. Imura, J. Vac. Sci. Technol. B 12, 3
(1994)
10Dip-Pen nanolithography
Richard D. Piner, Jin Zhu, Feng Xu, Seunghun
Hong, Chad A. Mirkin, Science, 283, 5402 (1999)
11NSOM
S. Hosaka, H. Koyanagi, A. Kikukawa, Y. Maruyama
and R. Imura, J. Vac. Sci. Technol. B 12, 3
(1994)
12NSOM
E. Betzig and J. K. Trautman, SCIENCE, 257,
5067(1992)
13Characterization of Nanostructure Device Using SPM
- STM
- Magnetic force microscope(MFM)
- Frictional force microscope
- Chemical force microscope
- NSOM
- Apertureless
14STM
- STM were used to measure quantum behavior of
nanowire - Nanoindentation
- Pulling slowly from surface
- Measure conductivity while pulling
15Magnetic Force Microscope
K. Babcock, "Magnetic Force Microscopy
High-Resolution Imaging for Data Storage",
Digital Instrument Application Note
16Frictional Force Microscope
C. M. Mate, G. M. McClelland, R. Erlandsson, and
S. Chiang, Phys. Rev Lett. 59, 1942(1987).
17Frictional Force Microscope
Relationship between output voltage and
frictional force
C. M. Mate, G. M. McClelland, R. Erlandsson, and
S. Chiang, Phys. Rev Lett. 59, 1942(1987).
18Frictional Force Microscope
C. M. Mate, G. M. McClelland, R. Erlandsson, and
S. Chiang, Phys. Rev Lett. 59, 1942(1987).
19Chemical Force Microscope
C. Daniel Frisbie, Lawrence F. Rozsnyai,
Aleksandr Noy, Mark S. Wrighton, Charles M.
Lieber, SCIENCE, 265, 5181(1994)
20Apertureless NSOM
B. Knoll, F. Keilmann, Nature, 399(6732).May 13,
1999.134-137
21Apertureless NSOM
Light frequency1.38GHz Sample2 nm deep
depressions in a 7 nmPt/C filmon a Si/SiO2
substrate. Resolution200nm
B. Knoll, F. Keilmann, A. Kramer, and R.
Guckenberger, Appl. Phys. Lett. 70 (20), 19 May
1997, p2667-2669
22Current Limitation and Solution
- Speed
- Constant height mode for STM
- Short Cantilever for AFM
- Multiple tip array
- Finite probe shape
- Nanotube
23Finite Probe Shape Problem
24A Nanotube AFM Probe
- Anodized with hydrogen fluoride
- Iron catalyst is electrodeposited from FeSO4
- Chemical vapour deposition (CVD) with ethylene of
750oC - Shortening of nanotube
J.H. Hafner, C.L. Cheung, C.M. Lieber, Nature,
398(6730) . 29 April 1999. 761-762
25Multiple Tip Array
- Fiber bundle with total diameter of
350mm,individual diameter of 3mm,total number of
fiber6000 - Wet-ecthing with buffer Ammonium Fluoride NH4F
for 7.5h - Removal of NH4F with deionized H2O
T.H. Dam and P. Pantano, REV. SCI. INST., 70(10)
OCT 1999