Realtime Response and System Integration in A Backend Semiconductor Manufacturing System

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Real-time Response and System Integration in A
Back-end Semiconductor Manufacturing System

• Robin G. Qiu, Ph.D.
• Dept. of Information Sciences
• Pennsylvania State University
• Email RobinQiu_at_PSU.EDU

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e-Business
e
Sales Service
Business
ERP/MRPII
MES

• Characteristics
• Fusion of Information at high level
• Internet technology

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Data Flow View of Enterprise Applications
Question 1 How information (overwhelming) from
multiple data sources can be tracked and
aggregated?
Question 2 How pertinent information can be
delivered in real time?
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The Concept of Real-time

• Embedded Control
• Shop floor information system
• Office-level planning

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Typical Back-end System
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Manufacturing Processes
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Current MES model
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MES Example SiView?

• Server side,
• all logic and application scenarios ranging from
  MES specification manager and material manager to
  web reporting.
• resides on an AIX platform, where the MES
  application is the highest level, while many
  industrial standard frameworks and middleware
  support are also included in order to support
  system extension and integration.

SiView? IBM trademark
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MES Example SiView?

• Client side, a thin GUI interface
• getting information on lot, consumables, setup,
  tooling, and process specifications before a
  process get started
• recording data on the process, consumed
  consumables, and quality assurance

SiView? IBM trademark
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Distributed MES?

• Distributed computing ? enabled technology
• Mechanisms
• architecture
• synchronization

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Virtual Production Lines

• Once a product is ordered and scheduled for
  production, a corresponding production line will
  be strategically and optimally formed based on
  the status of plant floor manufacturing systems
• As soon as the product gets finished, the line
  will be dismissed and all the equipment in the
  line will be optimally reallocated

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VPL-based Modeling
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VPL-based MES and SFCS Context Model
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An Prototype
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Legacy System
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• Questions?