Thin Film Deposition System for Superconducting Materials

1
Thin Film Deposition System forSuperconducting
Materials
Small Business Innovation Research
CVC Products, Inc
Rochester, NY

• INNOVATION
• Deposition process for thin films of high
  temperature good quality superconductors over
  large areas (2 sq. )
• ACCOMPLISHMENTS
• Developed a sputtering process for depositing
  thin films of superconducting material (YbCO)
• Deposited thin films that were used to
  demonstrate ferroelectric capacitors
• Processes transferred to an automated production
  machine
• COMMERCIALIZATION
• Sales of deposition system total 1 million
• Thin film coating service also available
• Future market potential includes systems for
  depositing ferroelectric and electro-optic
  materials

Sputtering Deposition System

• GOVERNMENT/ SCIENCE APPLICATIONS
• Microwave system components such as power
  dividers, combiners, switched filters and phase
  shifters
• Communication systems components
• Switched filters for the Deep Space Network

1988 Phase II NAS7-1113 NASA/JPL Contact -
Daniel Rascoe Company Contact - Paul Ballentine
Jet Propulsion Laboratory Success Story 029