Diapositive 1

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Nanotechnologies in France
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Nanotechnologies in France
What is nanotechnology?  Nanotechnology is the
understanding and control of matter at dimensions
of roughly 1 to 100 nanometers, where unique
phenomena enable novel applications.  Source
NNI www.nano.gov

• What is an industrial partner in
  nanotechnologies?
• From micro to nano (When does a company become
  involved in  nano ?)
• What kind of company? (Manufacturers?
  Integrators? End-product supplier?)
• Are there relevant figures of the  nanoworld ?
• Difficult to isolate the part of investments
  dedicated to nanotechnologies
• Nano RD leads to innovation (confidentiality)
• Where begins/stops the market for nanos ?(hard
  to find relevant figures)

3
Public budgets dedicated to nanotechnologies in
the world
Sources CEA/BEM, European Commission, French
Embassy in Japan, NNI , Lux Capital, CMP
Cientifica
4
Public research budget for micro
nanotechnologies in France
Key figures in France Public budget for research
(2005) 19,8 B ( 1 PIB) Total budget (public
and private) 2,2 PIB Goal 3 PIB in
2010 Micro and nanotechnologies public
budgets 445,6 M (2001) ? 616,5 M (2005) Main
recipients CNRS, CEA, INSERM, Estimated
private investments public budget
Source Le financement des nanotechnologies et
des nanosciences - Leffort des pouvoirs publics
en France - Comparaisons internationales (2004)
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Nanotechnologies in France Public initiatives

• Public Research Centers Universities, CNRS, CEA,
  INSERM, etc.
• - experience and knowledge
• - scattered specific research projects, not
  necessary within a larger program
• Public initiatives Ministries of Research,
  Industry, Defence, local authorities, research
  centres.
• Technological Research Networks and calls for
  proposals
• RMNT (micro and nanotechnologies, 1999-2004)
• RNMP (new materials and processes)
• R3N National Network for Nanoscience
  Nanotechnologies (2005)
• ACI Nanosciences
• PNANO
• OMNT technical watch on key subjects in Micro
  and nanotechnologies (CEA/CNRS)
• EMERTEC / EMERTEC 2 seed funding
• MINATEC innovation pole (2006) research,
  training and technology transfer
• European initiatives ERANET NanoSci-ERA
• EU project proposed and managed by France
• Goals
• coordinating national research policies of state
  members for nanosciences nanotechnologies

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Focus on RMNT results (1999 2004)

• RMNT select projects for financing by MoR, MoI
  and French Agency for Innovation (ANVAR)
• ? Selection by organization Committee 350
  experts (50 industrial, 50 academic)
• 146 projects received, 59 projects selected
• Total budget 200M, only 25 from public
  institutions
• 1069 p.year committed

• 29 large companies and 49 SME involved in the
  projects
• Main topics nanoelectronics, optoelectronics,
  connectivity and microsystems new topics
  biotechnologies, nanostructures, nanomaterials.
• 42 projects (26 achieved)
• Scientific results 270 publications, 43 PhD, 14
  post-docs
• Technological results 27 patents (11 projects),
  15 projects lead to technology transfer
• Economic results 6 companies created, 15 new
  products.
• ? Time to market 18 months 3 year after the
  end of the project. Economics results to be
  precised in 2 years.
• Source Yole Développement  Evaluation du
  RMNT  - juin 2005

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National Program for Nanosciences
Nanotechnologies (PNANO)

• PNANO Call for proposals launched by ANR and
  managed by R3N
• Goals
• Supporting fundamental research
• Developing and transferring innovative
  technology
• Increasing links between public and private
  research teams
• Means
• Financing 3-year projects (fundamental and
  applied)
• Fundamental projects a few hundreds k
• Exploratory industrial research (for new
  products, new processes, ) ? from 500 k to 1
  M
• Pre-competitive projects (prototype or
  demonstrator) 500k/1M
• Supporting research infrastructures (technology
  platforms)
• Coordinating actions education, information,
  knowledge dissemination, ethical and health
  issues linked to nanotechnologies development
• Increasing links between public and private
  research teams
• Budget
• 210 M (2005-2007)
• Budget 2005 35M for 75 projects selected by ANR

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National network of large technological platforms
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IEMN Lille Northern France
Institute of Electronics, Microelectronics and
Nanotechnology

• Key facts and figures
• Joint research unit between CNRS (France's
  national research body ) and 3 higher education
  institutions
• Expertise in AFM/STM, microwave devices,
  nanoelectronics, molecular electronics,
  acoustics, physics/biology interface
• 1600 m² clean rooms with 20 M world class
  equipment
• Staff of 420 people (190 researchers, 130 PhD)
• Worldwide collaboration

• Thematic research organization
• Materials and nanostructures
• Microtechnology and microsystems
• Micro and optoelectronics
• Circuits and communication systems
• Acoustics
• Microwave and ultrasonic technology and
  instrumentation

Source AFII - Invest in France IEMN
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IEMN Lille Northern France

• A wide range of research activities
• Multidisciplinary activities from basic physics
  to instrumentation
• Microtechnologies (Microelectronics,
  Microsystems )
• Nanotechnologies (nanoelectronics, molecular
  electronics)
• Interface of Physics with biology and chemistry

Scientific activities some applications
On wafer 140-220 GHz network analyser
E-beam lithography system
Source AFII - Invest in France IEMN
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IEMN Lille Northern France Industrial
Partnership

• TRT IEMN Common Laboratory on GaN RF
  Applications
• TIGER TRT IEMN GaN Electronics Research
• Objective develop GaN technology for high power
  RF applications
• TRT 340 p. 35 PhD 12 CNRS researchers
• - TIGER 15 men/year 7 PhD students dedicated
  to the lab.
• Technical objectives of Tiger focused on Thales
  core business
• Surveillance radars
• Radars for airborne and space applications
• Counter measures
• Collateral applications space telecoms, LMDS,
  MMDS, Services

• BioChipLab project (2002-2005)
• Conception and realization of a Lab-on-a-chip
  dedicated to supply a Mass Spectrometer for
  protein analysis
• Partners
• - Sanofi-aventis
• - CEA-LETI
• - Osmooze
• - LCOM (Laboratoire de Chimie Organique et
  Macromoléculaire)
• - IEMN

Source AFII - Invest in France IEMN
12

• Key facts and figures
• Joint research unit between CNRS and Paris XI
  University
• Research topics semiconductor materials,
  magnetic materials, nanostructures, microsystems
  and associated processes, optoelectronics
  photonics, micro-electronics components,
  conception of integrated circuits and computer
  architecture
• 35 CNRS researchers, 50 teaching researchers, 40
  engineers technicians, 70 PhDs.

• Micro-nano technologies technical centre CTU
  IEF/MINERVE

• MINERVE Microsystems, Imaging, Nanosciences,
  Education, Research, Valorisation, Entreprises
• Network of partners in Paris Region
  nanosciences technologies, microsystems
• Research, Education, Technology Transfer
• 2000-2006 7,5 M from Ministry of Research,
  CNRS, Paris XI University, Local authorities

• CTU University Technological Centre
• Equipment, services and training (CEETAM)
• Beneficiaries IEF projects and external
  companies Altis, AASA Optoelectronic, Chelton
  Telecom, Thales RT, Air Liquide, Nanovation.
• 2000-2006 7,5 M from Ministry of Research,
  CNRS, Paris XI University, Local authorities

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LPN Laboratory for Photonics and Nanostructures
- Paris

• Key facts and figures
• CNRS Research unit created in 2001
• 40 researchers, 40 eng. tech., 30 PhD, 12
  post-docs
• 1000 m² clean rooms, characterization equipment

• Research topics
• Quantum and Nonlinear optics, opto-electronics
• Microfluidics and nanostructures for chemistry
  and biology
• Micro-electronics and photonic devices
• Heterostructures Physics and growth
• Nanostructures, Electron Gas and Spin
  electronics
• Semiconductor and nanostructure Processing and
  Analysis
• - Epitaxy 350 m² clean rooms
• - Structural and optical analysis
• - Processing technologies

• Industrial partnerships
• Alcatel, ST Microelectronics, Altis
  semiconductor, Picogiga, Thales.
• Instrumentation project Nanofib with a german
  company ? patents

Source CNRS LPN www.rtb.cnrs.fr
www.lpn.cnrs.fr
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Nanomaterials cluster in Paris Region
Nanomaterials actors in France

• Strong research skills
• C-Nano RD nanosciences network in Paris region
• 5 research topics Nanochemistry, Nanophotonics
  and quantum processing, Nanobiophotonics, Spin
  electronics, Molecular quantum electronics
• Nanomaterials hybrid material, Legochemistry,
• 21 laboratories, 30 research teams, 150
  researchers
• CEA nanomaterial applied research platform
• Skills in bottom-up science and applied
  technologies
• Innovative coatings, nanoparticles,
  nanocomposites

• Nanomaterials industrial environment
• Nanomaterials actors in Paris Region
• ? 113 companies, research centres or
  institutions
• Large material companies active in nanomaterials
  
• Polymers Arkema, Rhodia
• Glass, ceramics Saint Gobain
• Steel Arcelor
• Cosmetics LOreal
• Final users with internal RD
• Transportation PSA, EADS, Snecma, Onera,
  Thales
• Air liquide
• Essonne Nanopole (semi conductor)

Source Digitip, Minefi
Source  Overview of the nanomaterials cluster
in Paris Region  - Yole Développement, Paris
Region Economic Development Agency
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Essonne Nanopole

• Key facts and figures
• Created by Altis semiconductor (JV IBM
  Infineon) in 1999
• 55 ha site, 40 km from Paris
• 25000 m² clean rooms
• 14 companies, 3000 employees, including 750
  engineers
• 2B invested, including 1 B over the last 4
  years

• A dynamic environment (Paris Region)
• 68 000 researchers
• 617 000 companies
• 364 000 students and 20 000 eng. trained per
  year
• 17 universities 20 engineering schools

• A major RD program
• RD centre created in 2003
• Partnership with IEF
• Developing high performance SOCs
• Magnetic memories MRAM
• ? Target mass production

Source Agence pour lEconomie en Essonne Région
Ile de France  The Paris Region, A silicon
design cluster  - Paris Region Economic
Development Agency
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Essonne Nanopole Industrial partnerships
Source Agence pour lEconomie en Essonne Paris
Region Economic Development Agency
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LAAS Toulouse Midi-Pyrénées
Source Invest in France Newsletter n 107
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LAAS Laboratory for Analysis and Architecture of
Systems

• Key facts and figures
• Joint research unit between CNRS and Paul
  Sabatier University, INP, INSA
• 11400 m² site, 474 employees (179 researchers,
  171 PhD)
• 2200 m² clean rooms (16M investment end 2006)

• 13 research groups organized in 4 research poles
• MINAS Micro and Nanosystems
• MOCOSY Modeling, Optimization and Control of
  the Systems
• ROSA Autonomous Robots and Systems
• SINC Critical Information Processing Systems
• Research areas
• Automatic control
• Computer science and engineering
• Micro and nano systems

Source LAAS www.laas.fr - Invest in France
Newsletter n 107
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LAAS industrial partnerships

• MINAS
• 6 research groups (70 p.) focusing on micro and
  nano technologies
• Microsystems and components conception,
  manufacturing and characterization
• Information and Communication micro nano
  systems
• Energy management micro nano systems
• Micro and nano systems for Physics, Chemistry
  Biology biosensors, biochips, microfluidics,
• Involved in national and european projects
• Collaboration with Motorola, Alstom, ST
  Microelectronics, Alcatel Space, etc.

• Joint laboratories and networks
• SMARTMOS (LCIP2) Motorola power integration
• PEARL Alstom Power electronics
• AUTO-DIAG Actia Automobile diagnosis
• RIS network Airbus, Astrium, Technicatome,
  Thales critical systems safety

• CEMES Centre for Materials Elaboration
  Structural Studies
• Autonomous CNRS Laboratory created in 1989
• Chemistry, Nanosciences and nanomaterials
• - CMI Chemistry of Inorganic Materials
• - GNS Nanosciences group
• - MC2 Crystalline Materials under stress
• - nMat Nanomaterials group

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FEMTO Franche- Comté Electronics, Mechanics,
Thermics Optics

• Key facts
• Joint research unit between CNRS and
  universities, created in 2004
• 350 p. (130 researchers, 125 PhD students)
• Pluridisciplinary research consistent with
  industrial tradition in the Region
• Micromanufacturing, micro and nano systems
• Telecommunications
• Biomedical engineering
• Energy and Environment
• International partnerships (ex LIMMS in Japan)

Implanteur ionique
Plasma Enhanced Chemical Vapor Deposition

• Technology Platform MIMENTO
• MIcrofabrication for MEchanics, Nanosciences,
  Thermics and Optics
• 370 m² ? 800 m² clean rooms with 15 permanent
  engineers technicians
• Platform for research teams and industrial
  collaboration

Source FEMTO www.femto-st.fr
Wafer bonding
XPS Analysis system
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Applied research, a central role for CEA/LETI in
Grenoble
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CEA/LETI industrial impact in Grenoble
30 start-ups

2000 jobs
700 jobs
15 000 direct jobs 30 000 indirect jobs
Industrial pole of excellence in MNT
6000 jobs
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Joint program between LETI and a leading Japanese
company

• Key facts and figures Yamatake corporation
• Created in 1906 Today 7000 employees
  worldwide
• Turnover 1700 M
• Core activity measurement and control
  technologies
• Solutions in industrial, factory and building
  automation

• LETI Yamatake relations
• 1998 chemical sensors licensed to Yamatake
• 1999 New RD issues in Yamatake Health,
  Environment, Energy
• 1999 Biochip program launched in CEA
• Feb 2000 patent CEA
• - Manufacturing process for biological and
  chemical molecules sequences for analysis
• Dedicated equipment need to be developed
• Interest of Yamatake

Source LETI Yamatake www.yamatake.com
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Joint program between LETI and a leading Japanese
company

• DNA Chip In Situ Synthesis Process
• 2002 collaboration starts
• May 2002 Dec 2003 RD
• - LETI Process Transfer to Yamatake
• Yamatake Specific development of equipment
• 1 full-time Yamatake engineer in LETI
• 2003-2005 Pre-industrialization phase
• Yamatake (Fujisawa Sagamihara)
• Dedicated laboratory, 6 new employees
• Equipment automation
• Production and distribution agreements
• LETI
• Consultant engineer ? co-writing for 2 patents
• 2005, Aug 11th License agreement
• ? 8 patents (1 in USA, 1 in Europe)
• June 2006 Commercialization GemkeyTM

In Situ Synthesis Process Licensed to Yamatake
GEMKEYTM DNA Chip

• 2006-2007 Further collaboration?
• Interest from Yamatake and LETI for new topics

DNA Chip 20 mers / 80 masking steps
Source LETI
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CEA examples of prestigious partnerships
Contract negotiation supported by a highly
specialized team of engineers and legal experts
250 contracts in hand 200 new contracts in 2004
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MINATEC The model for Micro-Nanotechnologies
A scientific hub for education, research and
industry
Education INPG 1,500 people
Research CEA-LETI 1,500 people

• Promoting
• inter-disciplinarity

• Attracting young talent

• Encouraging
• creativity

• Teaching skills for the future

• Accelerating the innovation process

Industrial applications Services for public and
private organizations 1,000 people

• Creation of
• long-term
• employment

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An infrastructure to implement the model
Applied Research CEA-LETI
Industrial research available to partners
Basic Research CEA-LETI / INPG
House of Micro-NanoTechnologies
Education INPG
4 000 persons by 2007
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Minatec area by 2009 1 BEuros invested for high
tech research
200 / 300 mm silicon platform Nano-characterizatio
n platform
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Thank youBruno PAINGStrategic Marketing
ManagerCEA17 rue des Martyrs, 38054 Grenoble
cedex 9, FranceTel 33 4 3878 2631Mob 33 6
7743 9919bruno.paing_at_cea.fr