Single atom imaging and manipulation

1
Single atom imaging and manipulation
Silicon (100) surface
Fe atoms on the Cu(111) surface
STM manipulation of single atoms is possible but
complete device fabrication procedure in vacuum
requires ability to locate devices 1 in 1
trillion chance
Don Eigler (IBM), Science 262, 218 (1993)
2
Atomically precise single P atom placement
Fine
Atomic
350C
S.R. Schofield, N.J. Curson, M.Y. Simmons et al.,
Phys. Rev. Lett. 91 136104 (2003).
3
Using STMs to fabricate devices
30µm
100µm
2 mm
SCANNING ELECTRON MICROSCOPE
SCANNING TUNNELING MICROSCOPE
OPTICAL MICROSCOPE
HUMAN EYE