MicroNano Systems

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Micro-Nano Systems
S.Polomoshnov?????????? ?.?.
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Agenda / content

• Description of the organisation/company
• Research activities of the organisation/company
• Research activities where co-operation is sought

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1. Description of the organisation/ company

• STATE RESEARCH CENTRE OF RUSSION FEDERATION
• Scientific and Manufacturing Complex (SMC)
  "Technological Centre MIET
• 124498, MOSCOW, Zelenograd, street 4806, h. 5,
  MIETPhone 7(495)534-45-21Fax
  7(495)913-21-92E-mail tc_at_tcen.ruWWW
  www.tcen.ru SMC "Technological Centre MIET was
  founded as University Research Centre at the
  Moscow Institute of Electronic Technology in
  June, 1988. In the middle of 1989 the main set of
  equipment was put into operation and at the
  beginning of 1990 the first chips were
  manufactured on the full CMOS technological
  route. In June, 1994 SMC "Technological Centre"
  MIET was awarded the status of State Research
  Centre. The Institute is situated in Russian
  "Silicon Valley" - in Zelenograd, a town 40 km
  from Moscow.

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2. Research activities of the organisation/company

• Microelectronics
• Design-technological bases for bipolar LSI CMOS
  and BiCMOS
• CAD and prototyping tools for operational
  development of specialized LSI
• New types of high-performance ASIC of high
  integration.
• Microsystem Technologies
• Microsystems and microsensors to analyze physical
  quantities including nano-size constructs
• Supertiny acoustic transducers
• Barometric pressure sensors and altimeters on
  their base
• Tensoresistive accelerometers
• Magnetoresistive sensors
• Integral detectors of a, b and g radiation
• Radio-frequency MEMS
• Microanalytical systems
• Element base to process microsensors
  information
• Intellectual microsensors of physical quantities
  
• Executive components.

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3. Research activities where co-operation is
sought
The perspectives of improving of output
characteristics of traditional thermal MEMS with
application nanotubes
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Photos of thermal MEMS sensitive elements
?????????? ?????????????? ?????????
????????????????
a) b)
c)
a hot wire anemometer for flow
sensor ?????????????????????? ???????????????
??????? ???? b uncooled microbolometer ???????
??????? ?????????????? c explosive gas
sensor ??????? ????????????? ?????
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Technology of thermal MEMS sensitive elements

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MEMS sensitive elements Ti uncooled
microbolometer

??????? ???????????????? Ti ?????????????
?????????????
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Research areas that cooperation with EU
Nanotube absorb layer ??????????? ???? ??
?????? ??????????
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Specific detectivity ???????? ???????????????
???????????
Reaction time ????? ????????????
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????????????????
0,5 2,0 ??

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Thank you
?????????? ?????? ?????????????, ?.?.?., ?.?.?.,
??? ??????????????? ????? ????
??? 7 [phone] ???? 7 (495)
913-2192 e-mail S.Polomoshnov_at_tcen.ru
psa_at_tcen.ru Sergei A. Polomoshnov,
Ph.D., Senior scientist, SMC "Technological
center" MIET tel [phone]
fax [phone] e-mail
S.Polomoshnov_at_tcen.ru
psa_at_tcen.ru