A simpler singleaxis slideway system for nanometer level positioning

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A simpler single-axis slideway system for
nanometer level positioning

• Hua Yang and Eric Buice
• Advisors
• Dr. Stuart Smith
• Dr. Robert Hocken
• Dr. David Trumper, MIT

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Overview

• Objectives
• Project Requirements
• Conceptual design
• Current work single-axis stage system
• Final design of single-axis stage
• Assembly
• Conclusion
• Future work

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Objectives

• Development of integrated position measurement
  system with nanometer uncertainties traceable to
  national standards.
• Translation mechanism for multi degree-of-freedom
  motion control.
• Integration of fine motion controllers into
  long-range instrumentation for nano-scale
  manipulation in centimeter-sized workspaces.
• Integration of combined uncertainty analyses for
  determination of system error budget.
• Integration of cascaded multi degree-of-freedom
  control systems.

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Requirements

• Vacuum Compatibility
• 10-3 to 10-4 Torr
• Range
• 50 mm ? 50 mm ? 10 mm
• Velocity
• 5 mm/sec max velocity
• Resolution
• 25 nm positioning
• 10 nm accuracy

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Conceptual design of motion control platform
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Why a single-axis stage system?

• To test the functionality of an H configuration
  slideway
• Test the performance of the polymeric bearings in
  a true working environment
• Implement and integrate control algorithms to
  working system

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Final design of single-axis stage
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Assembly of single-axis system

• Glued I-beams to base plate (8 x 8.5 x 1.75)

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Zerodur optical flats (1/4 wave) glued onto
I-beams
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Fringe patterns of optical flats under green light
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Disc coupling
Aerotech BMS60 series DC motor
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Single degree of freedom translator

• First resonance frequency at 6 kHz
• 17 microns displacement at 150 V

20 mm PZT stack
Mount for retro-reflector
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Conclusion

• System design and manufacture of single-axis
  stage is complete
• Functionality test of key components was
  successful
• Successfully delivered single-axis stage to
  collaborative group at MIT
• Control algorithms is ongoing at MIT

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Future work (cont.)

• Performance test of single-axis stage
• Begin design of XY coarse stage based on results
  of single-axis system
• Test 2nd generation 6 degree-of-freedom fine
  motion stage
• Design of metrology frame for motion control
  platform

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Questions?Comments?Suggestions?