Microoptics Project proposal for EE441 MEMS

1
MicroopticsProject proposal for EE441 MEMS

• Shu-Zee Alencious Lo
• Department of Electrical Engineering
• University At Buffalo

2
What is microoptics

• A technology to create optical system on a single
  chip
• Can be 3D with surface machining techniques

3
An example of application of microoptics

• Texas Instrument Digital Micromirror Device

L. J. Hornbeck, Digital light processing and
MEMS reflecting the digital display needs of the
networked society, (invided paper), presented at
SPIE/EOS European Symposium on Laser, Optics, and
Vision for Productivity in Manufacturing,
Besancon I, France June 10-14, 1996
4
Lenses in Microoptics

• Diffractive lens
• Refractive lens

5
Diffractive lens
M. E. Motamedi, W.H. Southwell, R. J. Anderson,
W. J. Gunning and M. Holz, High speed binary
microlens in a GaAs, Proc. SPIE 1544,33-44(July
1991)
6
Diffractive lens

• Working principle diffraction optics
• Easy to fabricate
• 100 fill factor
• Need computer simulation for fabrication
• Unable to be used in short wavelength

7
Refractive lens
1.  H. O. Sankur, R. L. Hall, M. E. Motamedi,
W. J. Gunning, and W. E. Temnant, Fabrication of
IR microlens arrays by reactive ion milling, in
miniature and Micro-optics and Micromechanics,
Proc. SPIE 2687, 150-155(1996)
8
Refractive lens

• Easy to model
• Low cost
• Suitable for short wavelength
• No 100 fill factor

9
Micro-hinge
1.    K. S. J. Pister, M. W. Judy, S. R. Burgett
and R. S. Fearing, Microfabricated hinges,
Sensors and Actuator A Physical, Vol. 33(3),
249-256(June 1992)
10
Laser collimating system
11
Febry-perot resonator
L. Y. Lin, J. L. Shen, S. S. Lee, M. C. Wu, and
A. M. Sergent, Tunable three-dimensional solid
Fabry Perot etalons fabricated by
surface-micromachining, IEEE Photon. Technol.
Lett. 8(1),101-103 (1996
12
Project objective

• To review current status of microoptics
• To understand the fabrication and application of
  microoptics(focus on diffractive lens)