The Michigan Nanofabrication Facility MNF Formerly SolidState Electronics Laboratory, SSEL

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The Michigan Nanofabrication Facility
(MNF)(Formerly Solid-State Electronics
Laboratory, SSEL)

• 7000 sq. ft. of Clean-room Space
• Compound Semiconductors
• MBE, MOCVD, LPE Growth Tools
• Submicron Lithography
• ECR Etching and Pattern Transfer
• Raith E-Beam Lithography
• Silicon Full 4 Wafer Processing
• High-Temperature Processing (24 Tubes)
• CVD Thin-Film Deposition
• Deep Silicon Etching
• Wafer Bonding and Alignment
• 3µm CMOS/BiCMOS, and SOI Processes
• Device/IC Test Capability
• Separate Instructional Facility