Quadrupole Analyser: Principle of Operation

1
Quadrupole Analyser Principle of Operation
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MS Theory from ESS Ltd
Detectors (faraday/channeltron)
Ion Source
Mass Filter
Signal Amplifier
Screen,Y axis
2
The Open Ion Source Type
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MS Theory from ESS Ltd
Filament 2
Filament 1
Source Electrode
Focus Electrode
Earth Electrode
Quadrupole Rods
3
The Enclosed Ion Source Type
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MS Theory from ESS Ltd
Gas Inlet
Filament 1
Electron Entry slit
Source Electrode
Focus Electrode
Earth Electrode
Quadrupole Rods
4
EcoSys Internal Component Layout
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Inlet
PSU
Analyser Housing
Quad Electronics
Gauge

Dry Pump
TMP
5
The EcoSys Capillary Inlet
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MS Theory from ESS Ltd
Split T
Sample connection
Analyser
2m Inert Capillary
Metrocil Leak
Bypass line to dry pump
6
Advanced Quadrupole Theory
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2t
X stab Boundary
Y stab boundary
-U-Vcoswt
stable
a
Stable Region
UVcoswt
q
Mass Filter
Ion Source
Dual Detector
7
The EcoSys Membrane Inlet
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MS Theory from ESS Ltd
Sample Flow
Analyser Chamber
Silicon Rubber Membrane
Membrane Carrier
8
Multi-process sampling system
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MS Theory from ESS Ltd
QMSPumps
v
Semiconductor Process chamber
PC Control
v
v
v
Sampling System
Process Selector from QMS