Nanofabrication and Characterization of nanosturcture Device Using Scanning Probe Microscope

1
Nanofabrication and Characterization of
nanosturcture Device Using Scanning Probe
Microscope

• Shu-zee Alencious Lo

2
Contents

• Nanofabrication using SPM
• Nanostructure device characterization using SPM
• Current limitation and solution

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Nanofabrication Using SPM

• STM
• Field -evaporation
• AFM
• Field evaporation
• Scratching and pouncing
• Dip-pen
• NSOM

4
Moving Atoms by STM(using Van der Waals Force)
D. M. Eigler and E. K. Schweizer, Nature 344, 524
(1990).
5
Field Evapolation by STM
T. T. Tsong, Phys. Rev. B 44,13703(1991).
6
Field Evapolation by STM
Sample Cleaved MoS2 TipTungsten tip Ordinary
operation condition 0.5V, 0.1nA Gap distance
0.5nm Pulsed voltage-5.5V, 70ms Linewidth0.32nm
S. Hosaka, H. Koyanagi, A. Kikukawa, Y. Maruyama
and R. Imura, J. Vac. Sci. Technol. B 12, 3
(1994)
7
Scratching and pouncing
M. Wendel, S. Kühn, H. Lorenz, J. P. Kotthaus and
M. Holland , Appl. Phys. Lett. 65, 14(1994)
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Field Evaporation by AFM
S. Hosaka, H. Koyanagi, A. Kikukawa, Y. Maruyama
and R. Imura, J. Vac. Sci. Technol. B 12, 3
(1994)
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Field Evaporation by AFM
Sample1.7nm SiO2 on top of Si TipSiO2 probe
with gold coating Pulsed Voltage-30V, 5ms Dot
diameter50-20nm
S. Hosaka, H. Koyanagi, A. Kikukawa, Y. Maruyama
and R. Imura, J. Vac. Sci. Technol. B 12, 3
(1994)
10
Dip-Pen nanolithography
Richard D. Piner, Jin Zhu, Feng Xu, Seunghun
Hong, Chad A. Mirkin, Science, 283, 5402 (1999)
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NSOM
S. Hosaka, H. Koyanagi, A. Kikukawa, Y. Maruyama
and R. Imura, J. Vac. Sci. Technol. B 12, 3
(1994)
12
NSOM
E. Betzig and J. K. Trautman, SCIENCE, 257,
5067(1992)
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Characterization of Nanostructure Device Using SPM

• STM
• Magnetic force microscope(MFM)
• Frictional force microscope
• Chemical force microscope
• NSOM
• Apertureless

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STM

• STM were used to measure quantum behavior of
  nanowire
• Nanoindentation
• Pulling slowly from surface
• Measure conductivity while pulling

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Magnetic Force Microscope
K. Babcock, "Magnetic Force Microscopy
High-Resolution Imaging for Data Storage",
Digital Instrument Application Note
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Frictional Force Microscope
C. M. Mate, G. M. McClelland, R. Erlandsson, and
S. Chiang, Phys. Rev Lett. 59, 1942(1987).
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Frictional Force Microscope
Relationship between output voltage and
frictional force
C. M. Mate, G. M. McClelland, R. Erlandsson, and
S. Chiang, Phys. Rev Lett. 59, 1942(1987).
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Frictional Force Microscope
C. M. Mate, G. M. McClelland, R. Erlandsson, and
S. Chiang, Phys. Rev Lett. 59, 1942(1987).
19
Chemical Force Microscope
C. Daniel Frisbie, Lawrence F. Rozsnyai,
Aleksandr Noy, Mark S. Wrighton, Charles M.
Lieber, SCIENCE, 265, 5181(1994)
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Apertureless NSOM
B. Knoll, F. Keilmann, Nature, 399(6732).May 13,
1999.134-137
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Apertureless NSOM
Light frequency1.38GHz Sample2 nm deep
depressions in a 7 nmPt/C filmon a Si/SiO2
substrate. Resolution200nm
B. Knoll, F. Keilmann, A. Kramer, and R.
Guckenberger, Appl. Phys. Lett. 70 (20), 19 May
1997, p2667-2669
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Current Limitation and Solution

• Speed
• Constant height mode for STM
• Short Cantilever for AFM
• Multiple tip array
• Finite probe shape
• Nanotube

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Finite Probe Shape Problem
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A Nanotube AFM Probe

1. Anodized with hydrogen fluoride
2. Iron catalyst is electrodeposited from FeSO4
3. Chemical vapour deposition (CVD) with ethylene of
   750oC
4. Shortening of nanotube

J.H. Hafner, C.L. Cheung, C.M. Lieber, Nature,
398(6730) . 29 April 1999. 761-762
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Multiple Tip Array

• Fiber bundle with total diameter of
  350mm,individual diameter of 3mm,total number of
  fiber6000
• Wet-ecthing with buffer Ammonium Fluoride NH4F
  for 7.5h
• Removal of NH4F with deionized H2O

T.H. Dam and P. Pantano, REV. SCI. INST., 70(10)
OCT 1999