http:www'eet'bme'hu

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Budapest University of Technology
Economy Faculty of Electrical Engineering
Informatics Department of Electron Devices
http//www.eet.bme.hu
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The Department of Electron Devices

• The only university department in Hungary dealing
  with all aspects of (monolithic)
  microelectronics. These include
• devices physics,
• microelectronics CAD tools (esp. thermal
  simulation circuit simulation),
• IC MEMS design,
• gas sensor design,
• thermal issues.
• Highly acknowledged European research center. Our
  research is focused on thermal problems of
  microelectronics gas sensors

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The Department of Electron Devices

• Head prof. Vladimír Székely
• The staff
• 2 professors
• 6 associate professors
• 4 lecturers
• 4 teaching assistants
• 5 engineers research fellows
• 6 PhD students
• administrators, technicians

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Education

• Basic studies
• Electronics I.
• (Device physics operation, microelectronics)
• for all 3rd year students of the Faculty
• Specialization
• Microsystems Circuit Modules
• from 3rd year, after basic studies in EE, 40-50
  students
• Our department focuses on microelectronics

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Education (continued)

• Subjects in the specialization
• (between 7th and 9th semesters)
• VLSI circuits
• Simulation laboratory
• Microelectronics CAD
• High level synthesis
• ASIC FPGA Laboratory
• Monolithic technology
• VLSI Laboratory
• MEMS (Microsystems)
• IC testing laboratory

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Education (continued)

• Individual work of students
• Project laboratory (8th and 9th semesters)
  individual work of students (min. 4 hours/week),
  solving an engineering task under tuition (two
  semesters) We need industrial topics!
• Diploma work (10th semester) solving a real
  engineering task with some consul-tation. We
  need industrial topics!
• Students Annual Scientific Conference

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Education (continued)

• Elective subjects
• E.g. Theory and fabrication of solar cells

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Research

• European projects
• BARMINT, THERMINIC, HIPERLOGIC, TALENT,
  DETERMIN, PROFIT
• thermal measurements (IR, LC, transient)
• thermal simulation
• electro-thermal simulation
• compact dynamic thermal modeling
• MEMS design and simulation
• US Air Force, Digital Equipment
• thermal simulation modeling
• electro-thermal simulation

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Research (continued)

• Partners

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Research (continued)

• Laboratories
• Thermal laboratories
• VLSI CAD Laboratory
• Semiconductor laboratory
• FPGA Laboratory

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Facilities - VLSI CAD Laboratory
SUN laboratory
Using Cadence Opus in the SUN Laboratory
Tektronix LV500 IC tester
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Facilities - thermal laboratory
AGA 780 IR camera with PC interface
T3Ster - the latest thermal transient tester on
the market
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Facilities - semiconductor laboratory
Scanning electron-microscope, PC interface
Diffusion furnace
Spreading resistance meter
Manual bonding machine
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Some research results

• Design of CMOS temperature sensors

Generic designs, almost process independent
behaviour
Frequency output version
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Some research results

• Design of
• thermal
• test dies

Our recent design 81 individually programmable
dissipator / temperature cells with boundary scan
interface, 6x6 mm2, 8 W
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Some research results

• Electro-thermal simulation

Experimental system implemented in Cadence Opus
on top of the ECPD07 design kit of Atmel-ES2
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Some research results

• Thermal
• imaging of
• IC-s

Liquid crystal based imaging with sophisticated
post-processing
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Some research results

• Thermal imaging of IC-s

Sophisticated post-processing of IR images
Thermal transient recording using the IR camera
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Some research results

• Thermal transient testing of IC packages

Identification of properties of the
chip-to-ambient heat-conduction path based on
thermal transient measurements
The so called structure functions provide the
required information
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Some research results
Thermal simulation and modeling of IC/MEMS
packages
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THERMINIC workshop
V. Székely program committee chair since 7 years
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Sensors Actuators Microelectronics
Journal Guest editors for 7 special number in the
last 6 years
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International awards
Europe award of the DATE conference -
- for the best CMP IC design
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International awards
USA Harvey Rosten award, 2001