6.????? (MICROMACHINING)

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6.?????(MICROMACHINING)
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• 6-1 ? ? (INTRODUCTION)
• ???,????????????,?????????????????????,?????????
  ??,?????????????????
• ??????????????? (microsized) ????
• ?????????,???????????
• ??????,????????
• ??????????,????????????????
• ??????????????,Micro?????,??????????,???????????
  
• ?????????????
• 1.??????????? (unit removal rate)
• 2.????????
• ?????,??UR,???????????????,??????????????

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?6-1 ?????????
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• 6-2 ???????(CONVENTIONAL MICROMACHINING)
• ????????,????????,?????????????,??????????????,?
  ????????????,???????????????,???????????,?????????
  ????????
• ??????????,???????????????????????,?????????????
  ??,??????????????
• ?????????????????????3D????? (micropins)?????????
  ??,???????????

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• 6-2-1 ????? (Diamond Microturning)

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• 6-2-2 ??? (Microdrilling)
• ??????????????,?????????????,??6-2??,???????????
  ??3D?????,??????????????

?6-2 ??????????? ( ????Fujino, M., Okamoto, N.
and Masuzawa, T., International Symposium for
Electro Machining (ISEM-XI), IFPL, Lausanne,
Switzerland, 613620, 1995.)
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• ????????????????
• 1. ???????????????,???????????????????????,???????
  ????????,???????????????????
• 2. ????????,?????????,????????????????

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• 6-3 ??????? (ABRASIVE MICROMACHINING)
• 6-3-1 ????? (Microgrinding)
• ?6-3????????????????????

?6-3 ???????????????????
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• ?6-3????????????????????

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• 6-3-2 ????????? (Magnetic Abrasive
  Microfinishing)
• ?????,???????? (MAF) ?????????,??????,??????????
  ?,????????????
• 6-3-3 ????? (Micro-Superfinishing)
• ????????????,????????,??????,??????????????,????
  ????????????,??????????? (stock removal
  rate),?????,????????????
• 6-3-4 ??? (Microlapping)
• ???????????????????,??????100 nm?10 nm????
  (microgrinding) ???? (microlapping)
  ?????????????,??????????????,???????????

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?6-4 ???????? ( ??),??,??0.5 mN, ??????????48????(
????Masuzawa, T., and Tonshof, H. K., Ann.
CIRP, 46, 821, 1997. Reproduced by permission of
CIRP.)
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• 6-4 ????????(NONCONVENTIONAL MICROMACHINING)
• 6-4-1 ???????? (Micromachining by Thermal
  Erosion)
• ????????????,???????????????,????????,????,?????
  ???????
• EDM?LBM?EBM????????,???????????,????????????
• ???????????,????????????????????
• ?????,?????????????????????????,??????????????

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• 1.?????????
• (1)?????????,????????????,?????????,??????????,??E
  DM???,?????????,??????
• (2)?????????,???????????
• (3)???????????????
• 2.?????????
• (1)??????????????,?????,????????????????LBM?EBM???
  ????,?????????????
• (2)??????????,?????????????,????,????,???,????????
  ???,??????,??????????????,???????

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• 6-4-2 ????? (Micro-EDM)
• EDM?????,??????????????,?????
• ????,???????????????????????,????????????????
• ??????????,????????,?????????,????????????

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?6-5 ??WEDG??????
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?6-6 ????????,??WEDG??????? ( ????Fujino, M.,
Okamoto, N. and Masuzawa, T., International
Symposium for Electro Machining (ISEM_XI), IFPL,
Lausanne, Switzerland,1995.)
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?6-4???WEDG??????????
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• ?6-7????EDM??????????????

?6-7 ???EDM?????????? ( ????McGeough, J.,
Micromachining of Engineering Materials, Marcel
Dekker, New York, 2002. Reproduced by permission
of Taylor Franics Group, LLC.)
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?6-8????????????????
?6-8 ???EDM???????? ( ????Fujino, M., Okamoto,
N. and Masuzawa, T.,International Symposium for
Electro Machining (ISEM_XI), IFPL, Lausanne,
Switzerland, 1995.)
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?6-9????????? (micro-electrodischarge grinding,
EDG) ????
?6-9 ?EDM?????
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• 6-4-3 ??????? (Laser Micromachining)
• ??????????CO2?Nd yag????,?????????????,???????
  ??????,??????,??????????????????,???????,??????1?2
  ???

?6-10 ?????????????,?? ( ????McGeough, J.,
Micromachining of Engineering Materials, Marcel
Dekker, New York, 2002. Reproduced by permission
of Taylor Franics Group, LLC.)
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• ?????????,?????????,????
• 1. ????1KW?????,?????????20???,????200
  ns,????????,????100???
• 2. ??????????????
• 3. ??Nd yag???Q?????,?????FS??,?????????????????
  
• 4. ???????????,????????????????
• 5. ????????,?????????????,?????????
• 6. ????????,????????????????
• 7. ??400?????,????300 W,??Nd yag???Q?????,??????
  ????,?1.5 m/min???,????300 ns,?????????????
• 8. ???????1????????,???????????????????????

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• 6-4-4 ??????????(Micromachining by
  Electrochemical Erosion)
• ???????????????????,??????????,??????????,??????
  ???????????

?6-11 ???????????? (a, b) ??? (c, d) ???? (
????McGeough, J., Micromachining of Engineering
Materials, Marcel Dekker, New York, 2002.
Reproduced by permission of Taylor Franics
Group, LLC.)
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• ?6-12?6-13????????,?????????EMM???

• ?6-12 ???????,????????????????,?????
• ???,(b, c) ???????????????
• (Reproduced by permission of Electrochemical
  Society Inc., From Datta, M., Data
• Frabrication of an Array of Precision Nozzles by
  Through-mask Electrochemical
• Micromachining, J. Electrochem. Soc. 142,
  3801-3805, 1995.)

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?6-13 ??????EMM????????SEM?? ( ????Datta, M.
and Harris, D., 1997. Electrochemical
Micromachining An environmentally friendly
high speed processing technology, Electrochemia
Acta, 42, 3007-3013. With permission of Elsevier.)
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• ????????????
• 1.??UR ( ????? )?
• 2.????????
• 3.???????,??????????????????
• 4.?????????????,????????
• 5.????????????
• ??????????????,?????,????????,????????????,?????
  ????????????????,???????????

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?6-14 ????????ECM?????? (Reproduced with
permission of CIRP From Masuzawa, T. and Tonshof,
H. K. Three dimensional micromachining by
machine tools, Annals of CIRP, 46 2, 82-828,
1997.)
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?6-15 ELID????