Plasma Display Panel? ?? ??

1
Plasma Display Panel? ?? ??
2
1. Plasma Display Panel ?? Process
?? ? ??
? Front Glass? ?? ??? 90? ???? ??
? ?
? ?
Visible Light
(Front Glass Substrate)
Bus Electrode
Dielectric Layer
Sustain Electrode
Front Glass Substrate
Protection Layer(MgO)
Protection Layer(MgO)
Bus Electrode
Dielectric Layer
Plasma
(Back Glass Substrate)
Sustain Electrode
Barrier Rib
UV
Address Electrode
Barrier Rib
Phosphor(R,G,B)
Visible Light
Dielectric Layer
Dielectric Layer
Under Layer
Under Layer
Back Glass Substrate
Address Electrode
Phosphor(R,G,B)
? ?
? ?
AC PDP? Glass?? Plasma? ????? ?? ???? ????,
????? ??? Condenser ??? ?? ???? ???? ??? ??
??? ?? Glass?? Address??? ???? ?? ?????, ?????
???? ?? ? ???? Coating? ????? ?????
???? Align?? ???? ??Gas? ???? Panel? ????
????? ???? ???? Module? ???? ??, ??, ???
?????.
1. ?? Glass?? ??? ????? ???? ??? ???? ??,
Panel ??? Ne Xe a??? ??? ??? ????. 2.
?????? ??? ???? ?? ?? ??? ???? ???? ????
????. 3. Plasma?? ??? ???? ?? ? ???(R,G,B)? ??/
???? ??? ??? ??? ??.
1/22
3
1. Plasma Display Panel ?? Process
PDP Assy
PANEL
MODULE
Glass
Driver Circuit
Memory
Signal Control Circuit
2/22
4
1. Plasma Display Panel ?? Process
PDP ???
?? ?? ??
??? ??
Seal? ??
??? ??
????? Condenser ??? ?? ?????? ???? Coating?.
???? ???? 2??? ????? ????? ??? MgO??? ???? ???
???.
??? ??? ??? ??? Frit Glass? ???.
????? photolithography??? Plasma ??? ?? ???? ???.
Protection Layer(MgO)
Seal
? ?
??? ??
Dispensing
BUS Electrode
MgO ??
??? ??
? ?
???
PR??/??
? ?
Front Glass
??/??
Sustain Electrode
Dielectric Layer
? ?
??
?? ??
??? ??
?? ??? ???? Cross talk? ???? ??? ?? 100???? ???
Sandblast???? ???.
?? ??? Address??? ?????? ???.
??? ????? R,G,B ???? Strip??? ???.
Barrier Rib
?????/??/??
??? ??/??
R?????/??
Dielectric Layer
?? ??
??? Film ??
G?????/??
?? ??
?? / ??
B?????/??
Back Glass
? ?
?? ??
Address Electrode
Sandblast
Under Layer
Phosphor(R,G,B)
?????/??/??
? ?
Aging
? ?
??/GAS??
Module ??
??? Glass? Align.
MgO ??? ???? ?? ??? ??? ?? ??? ??.
??? ???? ?? ??? ??? ??? Panel? ??? ?, ? 500Torr?
????? ??? ? ???.
??? Panel? ??? ???? ???.
??/
??
SET ??
??? Align
? ?
?? ??
Sealing
Clamping
GAS ??
?? ??
Soldering
? ?
? ?
TEST
Interconnection
Front Glass
Front Glass
Back Glass
Back Glass
?? ??
3/22
5
1-1. AC? PDP? ???
Seal
???(?)
Glass??
???(?)
???
????
????
?
MgO Depo.
??
??
Dispense
Coat
Glass??
Sputtering
P.??
Coat
Coat
Dry
Dry
Cleaning
PR Coating
?
Repair
Dry
Dry
Expose
Fire
Expose
Fire
Fire
Develop
Develop
Fire
Etch/Strip

???
Data ??
Glass??
???
Rib
???
?
Coat(R)
Dry(B)
Coat
Coating
Coat
Coat
Glass??
Dry(R)
Expose
Dry
Cleaning
Dry
Dry
Dry
?
Expose
Develop
Fire
DFR Lami.
Fire
Expose
Develop
Fire
Expose
Develop
Coat(G)
Develop
Fire
Dry(G)
Sandblast
P.??
Expose
Strip
Repair
Develop
Fire
Coat(B)
4/22
6
1-2. AC? PDP? ???
??/??/Gas
AGING
?/?? ??
Aging
Sealing
Pad Cut
??/Gas ??
P.??
??,??
????
??Check
5/22
7
1-3. AC? PDP? Module ??
? ?
Module
????
??FPC

??
?????
Dry
??
PCB??
Module??
Module Aging
IC??? ??
Dry
??CASE??
???
??????
6/22
8
2-1. ???? Process
??? ?? ? ??
AC? PDP?? ???? ?? ??? ????? ??? ????? ????? ?????
?? ????? ? ????? ??? ???? ???? BUS??? ????,
Data? Writing? ? ??? ?? Data??(??)?? ???? ??.
??(Front Plate)
1. ????(Sustain)? ?? ??? ???? ????? AC PDP? ????
????? Cell??? ????? ??? ?,
??? ????? ?? ??? ?? ??? ? ??? ?.
?? ??
????
?? ? ????

• ITO(Indium Tin Oxide)
• - Photoetching
• - Liftoff?
• SnO2(NESA?)
• - Liftoff?
• - Photoetching?

• ????
• ????
• ???? ???
• BUS???? ???.
• ???,????.

• ITO(Indium Tin Oxide)
• - Sputter?(???? ?? ??)
• - Ion Plating.
• - ?????.
• SnO2(??NESA?)
• - ?????(CVD)

???? (Sustain)
2. BUS?? BUS??? ??? ??? ?? ????? ??? ??.
????
?? ? ????
?? ??

• Cr/Cu/Cr,Cr/Al/Cr
• - Sputter?
• ???Paste(Ag)
• - ??, Coating
• Paste(Ag)
• - Pattern??

• ????
• ?????? ???
• ??? Uniformity
• ???
• ????? Matching?

• Cr/Cu/Cr,Cr/Al/Cr
• - Photoetching?
• - Liftoff?
• ???Paste.
• - Photo?.
• ?? Paste.
• - Direct Pattern??.

BUS??
??(Back Plate)
1. Address??(Data ??) Data? writing. -
BUS??? ???? ? ??? ???.
7/22
9
2-1. ???? Process
???? ????
1. PR Coating
1. ITO ??(Sputter)
Duct Roll
Roll? ????
ITO(0000000Å)
PR(Photoresist)
Glass
Glass
Coating Roll
2. PR Coating
Backup Roll
Duct Roll
Roll? ????
2. ??
PR(Photoresist)
Coating Roll
Glass
UV(365nm)??.
ITO
Photomask
Backup Roll
3. ??
??? ??
PR
UV(365nm)??.
Photomask
3. ??
??? ??
PR
PR(Photoresist)
4. ??
4. SnO2 ??(?? ???)
PR(Photoresist)
PR(Photoresist)
5. Etch/Strip
5. Photoresist ??
ITO
Acid Etching
Photoresist ??
8/22
10
2-1. ???? Process
BUS?? ? ???? ????
???
(UV)
PASTE ?
Cr/Cu/Cr??
??, Coating
Squeezer
???Ag
Screen Mask
PR Coating
Paste
? ?
Glass
Pre Baking
UV(365nm)??.
Photomask
? ?
??? ??
??/??
? ?
Post Baking
Etching
?? ?? ??
? ?
????
PR Strip
? ?
9/22
11
2-2. Barrier Rib ?? Process
Barrier Rib ????? ??
Red, Green, Blue ?? ??? ??? ???? ??
Screen Printing
Sandblasting Method
Squeezing Method
Photolithograpy Method
Direct Etching
Photosensitive Glass Paste
Glass Paste
Glass Paste
Thick Layer Resist
Glass Paste
Dry Film Resist Laminating Exposure/Develop
Glass
Photoresist Coating Exposure
Screen Printing
Exposure/Develop
Exposure
Photoresist
Resist
Repetition (10 15 times)
Squeezing Glass Paste into grooves
Sandblasting
Develop
Develop/Etch
Strip
Strip
Strip
10/22
12
2-3. ??? ?? Process
?? Flow
?????
Process
?? ??
Process Flow
?? ??

• ??

? ?
???? ??? ????? Condenser ??
? ?

• ?? ??

???, ???, ????,????,???? ????
????

• Binder Burn-Out
• ???? ???
• ???? ??
• (???, ????)

? ?
? ?
? ? ? ?
? ?
??? ??? ???
Screen???
??? Glass Paste (?,???)
? ?
27?
???
??? Glass Green Sheet (?,???)
??
Laminator ??? ???
Dry Film?
Glass
??? ???? Matching? ??? ??? ,???
11/22
13
2-3. ??? ?? Process
?? ??
?? ?? ??
?? ?
Dry Film?
?? ??
Process
1?? ITO ?? ??
? ?
D/F Laminating
Printing (23?)
Dry Film
2?? ???? ??
? ?
D/F Laminating
??
Glass??
? ?
? ?
Roll

• ? ??? ?? ??? ??
• ?? ??
• ????

• ? Cost
• ????? ?

??
??

• ? ??? ?? ????

• ?? Cost? ??

??

• ???
• ???
• ???

• Laminator
• ???

12/22
14
2-3. ??? ?? Process
??? Mechanism
1. ?? ?? ??
????? Paste? Screen Mask? ?? Glass ?? ???? ????
??? ? ??? Screen Mask? Paste? ??? ????
???,Address??,White Back,Rib, Rib,?? ???, B/M ??
PDP? ???? ?? ???? ? ??? ???? ??? ????? PDP? ???
???? ??? ? ? ??.
2. ?? Mechanism
S/Q(Squeezer)? ????? ?? ??? ?? Paste? ??? ???
???? ??? ?? ??. Screen Mask? SUS ??? ??? ??? SUS
??? ??? ??? ???? Paste? ?????? ??? ??? ?? ???
?????.
S/Q? Screen ?? ???? ??
Screen Mesh ???? Paste?? ( ?? Mechanism )
?? ??
S/Q
? ??? ?? Screen? ?? ??? ?? ( ? ?? Mechanism )
Paste
Screen Mask
???? ???? Paste? ??? ??? ??? ????. ( Leveling/
?? ?? Mechanism )
? ??
Leveling
??
Paste Rolling
??? ????? ??? ????, Paste, Screen Mask? 3?? ???
??? ??? ????? ??.
13/22
15
2-4. ??? ?? Process
?? Flow
???
?? ??
Process Flow
Process

• ??
• Patterning?
• ( ??/?? ?)

Pattern ??
????? ???? VUV ? ????? ??
? ?
R, G , B 3? ??
? ?

• ?? ??
• Leveling ??

???,???? ????,?? ????
????

• Binder Burn-Out
• ???? ???

? ?
? ? ? ?
??? ??
???
???
Sqeeze Rubber
R,G,B ??? Paste
Pattern???
-
Screen Mask
Barrier Rib
? ?
R,G,B??? Ag Paste
??? Paste?
???
Phosphor
R,G,B??? Green Sheet
Dry Film?
???
Electrode
Glass
14/22
16
2-5. ??? ?? Process
???? ?? ? ??
?????? ???? ?? ???? ?????? Panel? ????? ??? ???
?? ??, ???? 2? ??? ?? ?????? ?????
??? ??? ?? ??? ???.
??
?? ??
No.
?? ??
Panel ?? ??
?? (Life time)? ?? ? ???? ? ???? ??? ??. ?? ? ??
?? ??? ??? ?? ????? ??. ?? ??
???(? Sputter?)? ?? ? 2? ?? ????? ??? ? ????? ??
? ????? ?? ? Sealing ?/? ???? ?? ??? ?
1
2
3
4
5
??? ?? ??
???
??? ??
??? ??
Aging
??

• ????(???)

• ??? ?? ??
• EB, Sputter, Ion plating,
• ?? ??
• ?? ??
• Power (??, ??), ????
• ????, ???? ?

• ????, ???
• ??(Seal)??
• ?? Pumping ??,??

• Aging ??
• Aging ??

??

• ?? ?? ??
• (???,??,??,??)

• ??? ??? ??

• ????? ??
• ???? outgassing
• Crack

• Ion???? ???? ??
• ????? ? ??
• ???? ??(???)

???? ??
15/22
17
2-6. Seal??/??/?? Process
?? Flow ? ??
? Process? ??/?? Glass? ???? ?? ??? ??? ? Plasma
?? Gas? ???? ???? ????? ???? Seal???, ??/????
??? ???? ??. ??? Seal? ??? ?? Heater?, ??? ?? ??
Pump?? ??Gas ???? ???.
Process Flow
??? ?? ???
? ?
? ?
MgO??
??? ??
?? Align
Seal ???
Seal??
???
??/???
??
Gas??
Seal?? /??/ ???
???
Tip-off
Aging
16/22
18
2-6. Seal??/??/?? Process
Process ??
?/??? Align Key? ?? Clipping? ? Align??? ????
Seal??/??/???? ???. ??? Gas??? ?? ???? ??? ???
?? Frit Ring? ??? ? ???.
Process ??
Process
?? / ??

• ?/?? Glass? ?? Align Key? ??.
• ?/?? Glass? ????? ??? Align Key?
• ??? ?????? ????.

• ???

• Align? ?.?? ??? ?? Clip?? ? ??
• ????.
• Clip? ?? gt 0.0 0.0 Kgf/cm2

Clipping

• Clip(??? ??)

• ?/?, ?/? Align??? ???.
• Align ?? gt X 000?, Y 000 ?

• ?????

• ?? Gas??? ?? ???? ????
• Glass? ????? Frit Ring? ???.

• ???
• Frit Ring

• ?.?? ??? ?? Seal ?? ? ????
• Frit Ring ???.
• ?? gt 000000 ?

• Seal???

17/22
19
2-6. Seal??/??/?? Process
Process??
????? ?? Panel??? ???? ??? ? ?? Gas? ???. ????
???? Tip-off?? Panel? ???? Panel? ???? ?? Aging
? ????? ???.
Process ??
Process
?? / ??

• ??Gas ??? Panel ??? ???? ????
• ????? ??.
• ????? gt 10-7 Torr ??

• ??/???

• ???? ??? Panel ??? ?? Gas? ???.
• ?? Gas ??? Panel? ??? ???? ??
• ???? ???.
• ?? gt ??Gas ??(He, Ne, Xe.), ??

• ??/???
• ??Gas

• Panel??? ?? ??? Gas ??? ???
• ???? ????.

• Torch

• Aging?
• Tester
• ???

• Aging? Panel??? ???.
• ??/?? ?? gt ????, ??, ??
• (Open, Short, Cell Defect)

• Sustain??? Pulse ??? ???? ? Cell?
• ?? ??? ??? ???? Gas ??? ??.
• ?? gt ??, ???, ??, ??

• Aging?

18/22
20
2-7.?? Process
Module ?? ??
Process
000?,00Kgf/?? ?? ???? FPC? ACF??
ACF ??
Module ??
000?,00Kgf/?? ?? ???? panel? ??
FPC ??
Module??
Gas? ??? Panel? PDP ???? ??? ???? ??
?? Head ?
FPC
FPC ??) ACF) ??
? ??? ?? ?? ?? ? ??? ?? ??? ?? ? ? FPC? ???
Panel? ??? ??? ??
Panel
?? Head ?
) ACF Anisotropic Conducting Film FPC
Flexible Print Circuit
19/22
21
2-7.?? Process
Module ?? ??
Panel
PCB??
FPC
???
ACF Anisotropic Conductive Film(??? ?? Film)???
Au? Coating? Ni? Ball? ???? ?? ??? ??
Film??. ? 150C ???? ???? ??? FPC? Glass? ???? ???
????.
FPC Flexible Printed Circuit?? Polymide? ????
??? Pattern? ??? Film??? ?? ???? ?? ?????
?? ????. ?? ???? ??? Panel? ????.
?? ??? ??? ???? ??? ????? Panel? ?? ??? ???
????. ?? ???? Aging ??? Panel? ?? ??? ????? ????.
20/22
22
3. PDP ????
???? Process ??
?? Tool
????

• ???
• ??? Paste

• ??? ???
• ???
• ???

????
?????

• ??? Resist
• Photo-Mask
• Target?

• DC Sputter ??
• Resist ????
• (roll, coater,
• laminator,??)
• ????
• ????
• Etching ??
• Resist ????

Photo-Etching?

• ??? Paste
• ???
• Photo Mask

• ??? ???
• ???
• ????
• ????
• ???

??? Paste? ?? Photolithography?

• ??? ???
• ???
• ???

• ???
• ??? Paste

?????
?????
?????

• MgO Source

?????

• ??? ?? ??

21/22
23
3. PDP ????
???? Process ??
?? Tool
????

• ???
• ?? Paste

• ??? ???
• ???
• ???

????
?????

• Dry . Film
• ??Paste
• Photo Mask

• Dry . Film laminator
• ????
• ????
• ?? Paste ????
• ???
• Dry Film ????
• ???

Additive? (Photo-???)

• ?? Paste
• Dry . Film
• ???
• Photo Mask

• ?? Paste ????
• ???
• laminator
• ????
• ????
• Sand Blaster Machine
• Dry Film ????
• ???

Sand Blaster?

• Paste????
• ???
• ????
• ????
• ???

• ??? ?? Paste
• Photo Mask

??? Paste ??? Photolithography?
22/22