MEMS Micro-Electo-Mechanical Systems

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MEMSMicro-Electo-Mechanical Systems

• By Kelly Grahmann
• Meen 3344

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What is MEMS?

• Micro-Electro-Mechanical Systems
• is the integration of elements, sensors,
  actuators, and electronics on a common silicon
  substrate through micro-fabrication technology, a
  manufacturing technology for making microscopic
  devices
• Other Materials used in MEMS
• Gallium Arsinide
• Titanium Nickel
• Piezoelectric Materials

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How MEMS are made!

• There are three main building blocks in MEMS
• Deposition process
• The ability to deposit thin films of material
• Lithography
• is typically the transfer of a pattern to a
  photosensitive material by selective exposure to
  a radiation source such as light
• Etching Process
• Wet etching where the material is dissolved when
  immersed in a chemical solution
• Dry etching where the material is sputtered or
  dissolved using reactive ions or a vapor phase
  etchant

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Pictures of MEMS
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ExpectedCharacteristics of MEMS

• In the future, MEMS Technology compared to
  Conventional Technology should have these
  effects
• Cost reduction
• Increase functionality
• Improve reliability
• Decrease size
• Decrease mass

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References

• http//www.pcmag.com/encyclopedia_term/0,2542,tmi
  croelectromechanicalsystemsi46791,00.asp
• http//www.stormingmedia.us/96/9694/A969424.html
• http//www.swri.edu/3pubs/brochure/D64/MEMS/home.h
  tm
• http//www.smalltimes.com/document_display.cfm?doc
  ument_id1566
• http//www.memsnet.org/mems/what-is.html
• http//www.wikipedia.org
• http//www.thinfilmmfg.com/subscribers/Subscriber0
  2/mems10Apr02.htm