Selecting Equipment for Silicon Wet Etching

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Selecting the Right Equipment for Silicon Wet
Etching
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• Semiconductor manufacturing processes involves
  different processing steps that require
  fabrication facilities to utilize the right
  processing equipment. So, its vital for a
  fabrication facility to choose equipment that
  supports all their application and meets their
  requirement.

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• At Modutek Corporation, we carry a wide range of
  high quality semiconductor manufacturing
  equipment and other reliable products that suit
  all silicon wet etching applications.

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• QUARTZ BATHS
• Quartz baths are designed for safety and
  reliability. These baths support a variety of
  etching, cleaning and stripping processes
  including SC1 cleaning, RCA clean and SPM clean.
  Made of semiconductor grade, flame polished
  quartz, they come in a variety of sizes to meet
  your requirement.

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• TEMPERATURE CONTROLLED CIRCULATORS
• Temperature controlled circulator units feature a
  compact design and stainless steel fluid paths
  for a high level of safety and reliability. With
  a heating capacity of 1500 W, these circulators
  are suitable for etching, plating and developing
  applications and constant temperature baths.

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• QUICK DUMP RINSERS
• The unique specialty of quick dump rinsers is
  that they provide efficient process rinsing
  without particle entrapment and reduced use of
  de-ionized water. Other features include bottom
  filling, well-located D.I water spray nozzles and
  N2 agitation.

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• TEFLON TANKS
• The modular design of Teflon tanks is easy to
  integrate into new silicon wet etching stations
  or incorporate into existing stations. This
  equipment is available in different sizes for
  single or double capacity and they support KOH
  Etching and TMAH applications.

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• Visit www.modutek.com to find a full range of
  semiconductor manufacturing and silicon wet
  etching products.
• Call 408 362-2000
• E-mail modutek_at_modutek.com

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