High Aperture Head

1
High Aperture Head

• The only commercial AFM on the market integrated
  with 100x high NA objective in upright geometry

Dec. 7, 2005
NT-America
Dec. 5, 2005
NTEGRA Spectra
Dec. 6, 2005
2
AFM with 100x objective in upright configuration
for non-transparent samples
Cantilever deflectometer
Optical AFM head (100x,0.7 NA objective inside)
Laser inputscanning module
The only commercial AFM in the world integrated
with 100x high NA objective in upright
configuration !!!
Dec. 7, 2005
NT-America
Dec. 5, 2005
NTEGRA Spectra
Dec. 6, 2005
3
Laser input scanning system

• Light input-output scanning module
• Scanning confocal microscope regime by scanning
  mirror 7
• Provides fine focus adjustment of the excitation
  beam by moving lens 3
• Adjustable height and orientation of the
  entrance aperture (mirror 8)
• Dichroic mirror 6 allows the sample observation
  for exact positioning

Dec. 7, 2005
NT-America
Dec. 5, 2005
NTEGRA Spectra
Dec. 6, 2005
4
High Aperture AFM setup

• Objective holder unit
• Fine XYZ positioning
• Mitutoyo 100x M PlanApo objective
• NA 0.7, F 2 mm
• 6 mm working distance.
• 0.4 µm optical resolution
• Infinity corrected optics
• Bright Field and Dark Field objectives available

Dec. 7, 2005
NT-America
Dec. 5, 2005
NTEGRA Spectra
Dec. 6, 2005
5
High Aperture Head STM setup

• Objective holder unit
• Fine XYZ positioning
• Mitutoyo 100x M PlanApo objective
• NA 0.7, F 2 mm
• 6 mm working distance.
• 0.4 µm optical resolution
• Infinity corrected optics
• Bright Field and Dark Field objectives available

High aperture head STM setup.
Dec. 7, 2005
NT-America
Dec. 5, 2005
NTEGRA Spectra
Dec. 6, 2005
6
Header

• Exchangeable probe holder units
• (1) AFM measuring head for standard cantilevers.
  
• Cantilever inclination 12
• (2) STM measuring head.
• Probe diameter from 0.25 up to 1 mm
• 4 - 6 mm long.
• Special probe holder design to
• eliminate sample shadowing
• Both mount to standard NTEGRA platform

AFM (1) STM (2) measuring heads
Dec. 7, 2005
NT-America
Dec. 5, 2005
NTEGRA Spectra
Dec. 6, 2005
7
Optical AFM (100x objective) with thermohead
TV camera objective
light coupling and scanning unit
AFM with 100x, 0.7 NA objective
thermohead
Temperature range -30-200C . Heat up time lt200
sec Thermal drifts lt3 nm per 100 minutes (in
X,Y Z) in all the temperature range !!!
Such unprecedented stability is especially
important for Raman experiments where long
integration times are required
NTEGRA Spectra
8
Simultaneous imaging and AFM scanning

• Atomic Force Microscopy
• Observe the sample surface during the scanning
  process
• The high NA objective enables sample imaging
  even under the cantilever
• Available for both standard contact and semi
  contact AFM modes

AFM topography and optical image of a rectangular
5 µm crater on the sample surface
Dec. 7, 2005
NT-America
Dec. 5, 2005
NTEGRA Spectra
Dec. 6, 2005
9
Wells semicontact mode (vertical oscillations)
High Aperture Head
AFM cantilever over a structured Si substrate.
View through 0.7NA 100x objective Apex of opaque
Si cantilever looks transparent on the
image! This fact is due to high aperture (0.7 NA)
of the imaging objective
Dec. 7, 2005
NT-America
Dec. 5, 2005
NTEGRA Spectra
Dec. 6, 2005
10
Wells semicontact mode
High Aperture Head
Topography 12.6x12.6 µm2
Topography 12.6x12.6 µm2
AFM-image of the same sample area as on previous
slide
Dec. 7, 2005
NT-America
Dec. 5, 2005
NTEGRA Spectra
Dec. 6, 2005
11
Wells semicontact mode
High Aperture Head
AFM cantilever over a Si substrate with metal
electrodes. View through 0.7NA 100x
objective Apex of opaque Si cantilever looks
transparent on the image! This fact is due to
high aperture (0.7 NA) of the imaging objective
Dec. 7, 2005
NT-America
Dec. 5, 2005
NTEGRA Spectra
Dec. 6, 2005
12
Wells semicontact mode
High Aperture Head
Dec. 7, 2005
NT-America
Dec. 5, 2005
NTEGRA Spectra
Dec. 6, 2005
13
High Aperture Head 0.5 mm grating
Dec. 7, 2005
NT-America
Dec. 5, 2005
NTEGRA Spectra
Dec. 6, 2005
14
High Aperture Head 0.5 mm grating
Topography 7.8x7.8 µm2
Phase 7.8x7.8µm2
Dec. 7, 2005
NT-America
Dec. 5, 2005
NTEGRA Spectra
Dec. 6, 2005
15
AFM confocal microscopy , Si/SiO2 grating
__ 1mm
Confocal Raman, 520 cm-1 Scanning by stage
AFM topography
__ 1mm
Confocal Raman, 520 cm-1 Scanning by mirror !
Dec. 7, 2005
NT-America
Dec. 5, 2005
NTEGRA Spectra
Dec. 6, 2005
16
High Aperture Head
Latex balls colored with Radomine dye
Confocal fluorescence image at 540 - 620 nm range
8x8 mm scan
20x20 mm scan
Dec. 7, 2005
NT-America
Dec. 5, 2005
NTEGRA Spectra
Dec. 6, 2005
17
High Aperture Head
Confocal Raman image, 520 cm-1
_ 1mm
Defect on Si wafer, produced by high intensity
focused laser beam
Dec. 7, 2005
NT-America
Dec. 5, 2005
NTEGRA Spectra
Dec. 6, 2005
18
Optical Layout
Dec. 7, 2005
NT-America
Dec. 5, 2005
NTEGRA Spectra
Dec. 6, 2005
19
High Aperture Head main Values

• Fully functional 3D confocal microscope for
  non-transparent (and transparent) samples
• Two types confocal microscopy in one instrument
  
• scanning by sample scanning by beam
• - AFM cantilever directly under 100x 0.7 NA
  objective !
• gt AFM scanning simultaneously with sample
  imaging (at nearly highest possible resolution of
  0.4 µm !) and confocal scanning
• gt Best suited for TERS and other tip-enhanced
  experiments
• - Very good AFM performance (lt0.02 nm RMS)