Electromate

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• Electromate
• Nanotechnology Seminar

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AMT 1 Motor for Image Stabilization
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Agenda

• Corporate Overview
• Motor Technology
• Theory of Operation
• Design Considerations
• Mechanical Structures
• Operating Environments
• Control Systems
• Applications
• Positioning VS Traditional Drive Technology
• Questions/Answers

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Corporate Introduction

• Nanomotion
• Established in 1992 for the design, manufacture
  and marketing of piezo-ceramic motors and
  electronics (for linear and rotary motion)
• January 2005, 51 owned by Johnson Electric
  (1.8B, 38,000 employees, 3 million motors/day)
• Nanomotion is 70 people with 35 in the
  engineering and RD.
• Industrial products manufactured in Israel
• Consumer products manufactured in China

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Nanomotion Markets

• 40 Biomedical
• 40 Semicon Data Storage
• 5 Aerospace, Metrology, Laboratory
• 3 Telecommunications Other
• 12 Stage companies (mostly semicon)

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Theory of Operation

• Piezoelectric effect
• The piezoelectric effect was discovered in 1880
  by brothers Pierre and Jacques Curie
• Piezo means Push in Greek
• This effect is used in Sonar, Ultrasound
  applications, Sensors (load cells, strain gauges)
  Microphones and motors
• Nanomotion holds 50 patents in the area of
  Piezoelectric motion technology

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Nanomotion

• Theory of Operation
• Traditional Piezo VS
• Reversed Piezo VS
• Standing Wave

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Piezo Direct and Reverse Effect
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Basic Structure of Nanomotions Piezoelectric
Element
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Nanomotion Motor Basics Ultrasonic Standing
Waves
Bending Mode
Longitudinal Mode

• Simultaneous excitation of both modes
• creates motion at the edge of motor fingertip

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Finite Element SimulationLongitudinal
Mode Bending Mode
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Ceramic Servo MotorsUltrasonic Standing Wave
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Motor Ellipse

• Amplitude of ellipse varies with voltage
• Slow speed ellipse at the few nm level
• High speed- ellipse at the tens of microns
• The larger the ellipse, the more the mechanical
  stress, the more the heat, the less the duty
  cycle

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Nanomotion Motor Basics
Rotary Table

• Linear Motion Rotary Motion

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Same Motor for Linear or Rotary Motion
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Motor Assembly
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Motor Features

• Standard motors for most operating environments
• Unlimited travel with small operating package
  (Drive strips to 4m length)
• Superior move settle Slow speed CV
• DC Mode for NANOMETER POSITIONING
• Vacuum motors for high and UHV (Up to 10-10 Torr)
• Non-Magnetic motors / No EMI from motor
• No servo dither no hysteresis
• Built in holding / braking without power
  consumption
• Wide range of dynamic performance
  (Resolution to 1nm, velocity from 1u/sec to
  300mm/sec)
• Cost effective direct drive solution

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Considerations and Guidelines for Stage Design
and Motor Mounting
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Key Parameters for Performance Life

• Stiffness, Rigidity
• Protecting the motor tips
• Heat dissipation considerations
• System natural frequency

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Stage Design
Mechanical Considerations - Stiffness

• Correct Mounting Procedure Requirements
• Rigid backing for Drive Strip
• Rigid motor mounting base
• Motor working directly against bearings

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Stage Design
X
Motor

• Not Recommended
• Drive strip not rigid
• Motor mounting not rigid
• Motor not working against bearings

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Stage Design

• When designing an application, a high quality
  cross-roller slide is recommended, with the
  following specifications
• High stiffness 30 to 50 N\?
• Straightness - 50 ?
• Low friction coefficient
• Caging unlikely to occur

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Stage Design
Utilize mechanical hard stops to protect the
motor tips
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Mechanical Considerations

• Motor Preload
• The Piezo elements are preloaded against the
  bearing structure (slide assembly).
• The bearings should be able to withstand 200N
  (20x10) per element pre-load force.
• Flatness along travel ? 50 microns

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Mechanical Considerations

• Recommendations
• Cross roller bearings provide precision and
  smoothness
• Recirculating linear guides for longer travel
• Use double-sided tape when installing the drive
  strip to damp vibrations.
• Apply Epoxy to drive strip to avoid double-sided
  tape creep

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Natural Frequency

• For fast settling , high accuracy applications,
  the natural frequency should be maximized

K Stiffness M Moving Mass
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Natural Frequency

• Where

fn Natural frequency K Stiffness m Moving
mass

• Example
• m 40 kg
• The motors to be used are HR 8
• With each

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Natural Frequency

• For 6 motors
• For 8 motors

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Choosing The Right Motor
HR Series
Vacuum, UHV and Non-Magnetic Series
MM Series
LS Series
ST Series
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Motor Sizing
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Choosing The Right BearingManaging Normal Force
and Stiffness
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Normal Force

• There is 20N (5 lbs) of Normal Force applied into
  the bearing structure per motor element.
• In addition to the Normal Force, acceleration
  forces can generate 2 to 3 times the Normal Force
  in side loading against the bearing structure.

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Bearing Designs

• Regardless of linear or rotary applications, the
  bearing stiffness (and preload) must be
  sufficient to support the Normal Force and
  potential acceleration forces.
• The required stiffness of the bearing is 50N/µm

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Linear Bearing Designs

• Crossed Roller, Non-Recirculating Linear Bearings
• Linear Recirculating Guides
• Needle Bearing, Non-Recirculating Linear Bearings

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Crossed Roller Bearings

• Crossed roller bearings provide exceptional
  stiffness for a mechanical linear bearing (only
  mechanical bearing that is higher is needle
  rollers).
• Crossed rollers utilize a mechanical/adjustable
  preload that must be set to achieve the
  appropriate bearing stiffness and capacity.
  Insufficient preload can cause the rollers to
  become disengaged when the motor is mounted.
• Crossed rollers provide equal loading in all
  directions

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Crossed Roller Bearings

• Bearing capacity deflection based on standard
  steel bearings
• Capacity of the assembly relates to the number of
  rollers per slide.

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Stiffness Example with Crossed Rollers

• FB075-100 Stage with HR4 (80N normal force)
• 3mm crossed roller bearings
• 125mm long rail with 100mm travel
• Roller strip length is 75mm long with 15
  rollers/strip (base calculations on 14 rollers)
• Half the rollers support load, so there are 14
  load carrying rollers.
• Total Dynamic Capacity is 14 x 13.2 kg/roller
  185kg total capacity
• At a load 185 kg 1813 N force applied to the
  bearing with a maximum bearing deflection of
  6.1µm.
• 1813N/6.1µm 297N/µm

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Recirculating Linear Guides

• There are many types of recirculating linear
  guides, each offering different features in
  load/stiffness, direction of load, and friction.
• The primary considerations are
• 2 point VS. 4 point contact (impact on
  Coefficient of Friction)
• Loading direction (Limits motor orientation

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Linear Guide Bearing Specification

• Linear guides are offered with a variety of
  accuracy grades and preload values
• The higher the accuracy grade, the more uniform
  the ball diameter, resulting in smoother motion
  and higher stiffness, as each ball is under more
  even loading.
• Preload values range from no preload to zero
  clearance to negative clearance. The stiffness is
  highest when there is negative clearance,
  indicating that the ball bearings are under
  compression.

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Stiffness Chart for Recirculating Linear Guide
With One Row of Balls Per Side
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Stiffness Chart for Recirculating Linear Guide
With Two Rows of Balls Per Side
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Linear Guide Bearing Configurations and Motor
Preload
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Non RecirculatingBall Rollers and Needle Bearings
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Rotary Applications

• Load/Stiffness characteristics are the same for
  rotary bearing as linear bearings (50N/µm)
• Most rotary bearings require (2) bearings to
  offset each other and create a preload

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Axial Mounting VS Radial MountingOperating
Characteristics
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Rotary Bearings
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Multiple Motors on Rotary
Single motor mounted radially with cross roller
bearing
Multiple motors mounted in opposing configuration
with crossed roller bearing. Zero normal force on
the bearing structure.
Multiple motors NOT opposing. Can be used if
force is desired on the bearing structure.
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Summary of Key Design Practices

• The preload spring in the back of the motor will
  allow for a deviation of 50 microns without a
  significant impact on performance
• Most precision bearings, crossed roller,
  recirculating guide, and rotary bearings will
  operate well within these tolerance requirements,
  keeping the straightness of travel below 15
  microns
• Based on the motion profile and the intended
  accuracy, the mechanical structure must take into
  account optimum geometry of motion, stiffness of
  bearings and stage natural frequency

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Summary of Key Design Practices
Mechanical Design and Sizing For good
performance, cool and quiet operation, the motor
needs to see a Brick Wall. i.e. very stiff
mechanical structure. The rule of thumb is
stiffness of 50N/u along the axis defined by the
motor tips, pointing into the ceramic strip or
disk. Stage ceramic need to run parallel w.r.t.
motor tips to within 2 mil (50 microns). Rules of
thumb 1 lb of stall force per motor
element. 0.75 lb of static holding force per
motor element. A motor element can drive 1 lb of
horizontal moving mass (conservative). A motor
element can drive 0.3 lb of un-supported
vertical mass. Use counter-balance or spring to
compensate for gravity. Use our motor sizing
tool.
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Summary of Key Design Practices
Mechanical Assembly Do not operate the motor
un-loaded (i.e. not preloaded to the ceramic
surface.) Observe correct orientation of the
motor w.r.t the moving surface. Arrows on the
motor case show direction of motion. Use shim to
pre-load ST, HR1 and HR2 motors. Use built-in cam
screws to pre-load HR4, HR8 motors. Ensure the
motor tips do not fall off the ceramic surface.
Use hard stops. Avoid air bubbles when mounting
the ceramic with double-sided tape. Glue the
ceramic to the stage with two drops of epoxy.
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Summary of Key Design Practices
Conditioning (burn-in) Must condition motor
before tuning . Limit command to 5V and use
Abort on Position Error at the controller to
protect the motor during initial integration and
conditioning. Burn-in cycle 4 hours minimum at
50 mm/sec, 50 duty cycle. Condition at ambient
never in vacuum At the end, wipe the ceramic with
IPA. Re-condition the motor each time it is
disengaged from the ceramic surface.
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Summary of Key Design Practices
Tuning While tuning, avoid prolonged operation in
an unstable (vibrating) condition. For AB1A, AB2
and AB4 amplifiers (exhibiting dead-band) Use
controllers with Nanomotion-approved firmware
algorithm (ACS, Galil, Delta Tau, MEI, Acroloop,
NI, Nyquist, etc.) depending on position
requirements. Find command threshold when motion
starts, back off 40, and make that the offset
value. Define dead zone min, max. For AB5
classical tuning start with zero Ki, Kd, then
increase Kp for stiffness, add Kd for damping,
add Ki to pull into final position. Test
performance at desired motion profile using
motion scope. When satisfied, vary each parameter
by /-20 and re-confirm performance. This will
ensure robustness.
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Vacuum Considerations
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VACUUM

• Motion Application in vacuum (V) and ultra high
  vacuum (UHV).
• Design consideration for vacuum applications.
• Nanomotion motors for vacuum applications.

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Motion Application in Vacuum

• Inspection with SEM/TEM
• E beam Direct writing
• Ion Beam applications (FIB)
• Space applications.

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Design Consideration for Vacuum Applications

• Heat dissipation
• In the vicinity of gas molecules, heat
  dissipates solely through
• Matter (conduction)
• Radiation
• Material compatibility (outgassing)
• Most materials release molecules to the vacuum
  chamber causing contamination. Stainless steel,
  non-anodized Aluminum, Ceramic material, some
  special plastics (PTFE, Epoxy, PEEK, Viton) and
  high molecular weight fluorinated oils are
  typical materials used in vacuum applications.

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Design Consideration for Vacuum Applications

• Material compatibility (continue)
• Porosity - Material with high porosity (i.e.
  anodized Aluminum, molded metal parts, low
  quality welding, etc.) traps air molecules and
  produce virtual leaks in the vacuum chamber.
• Magnetic properties
• Some vacuum application are very sensitive to
  residual magnetism of the system. Non magnetic
  materials such as ceramics, special plastics
  ,aluminum, titanium and some other nonferrous
  alloys are used in such applications.

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Design Consideration for Vacuum Applications

• Dielectric stability
• Air has very good insulation properties, and
  therefore high voltage may be applied in vacuum
  atmospheres as well as in ambient atmospheres
• At the range of 10E-2 Torr (Corona region) the
  insulation properties of air are low and
  electrical breakdowns may accrue. Do no operate
  motor before vacuum level reaches 10E-4 - The
  Corona Region, until you talk to Alan!

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Guidelines for UsingNanomotion Vacuum Motors

• Motor can withstand baking up to 140C (or
  higher). After baking, a 24hr waiting period is
  recommended. If the motor is energized when still
  hot from baking, the thermal EOP will be much
  lower UHV motors have bare wires that should be
  connected to the contacts of the vacuum chamber.

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3 Axis X-Ray Probe Manipulator

• X/Y/Z Vacuum stage for X-Ray Spectroscopy Micro
  Analysis.
• Positioning a probe that is 400mm long and
  holding position stability with no dither.

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Custom UHV Stages

• 3 Axis stage in UHV for semicon applications.
• Replaced Burleigh inchworm with crossed roller
  stage and HR2-U motors
• Now using custom motion system built by Nanomotion

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Custom Motion Platform

• Focused Ion Beam motion platform with high
  position stability
• Now building first 4 machines of Nanomotion
  design for them.
• Complete X/Y/Theta

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Drive Technology Comparison

• ?? Piece Construction

2 Piece Construction
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Positioning with respect toother motion
technologies
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Nanomotion Applications

• Bio-Medical/Pharmaceutical
• Semiconductor/Data Storage (standard to UHV
  environment, non-magnetic motors)
• Light Assembly Automation
• Metrology/Inspection Equipment
• Fiber Optics Photonics

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Biomedical Application Base

• Cell Imaging (Cytopathology, Gene/DNA analysis)
• Spectroscopy
• Surgical Robots Manipulators (MRI compatible)
• Microfluidics/Proteomics/Flow Cytometry (drug
  discovery development)
• Device Manufacturing (Angioplasty balloons,
  implant devices)

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Virtual Microscopy Solutions forAnalysis and
Discovery

• Digitized entire microscope slide with scanning
  operation
• Scanning resolution to .23u/pixel with 40x
  objective (motion system to 50nm resolution)
• CV for scanning and integrated Z axis for
  managing Cell Terrain
• 151 Data compression ratio for file management
• 15mm sq region scanned in 5.6 minutes (at 20x)

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Cell Imaging

• Rapid scan locates 22 areas of interest (field
  of view) with step and repeat motion
• Slide imaged in 4 min/ 360 slides per day.
• Improve Sensitivity Specificity (false
  positive)

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Auto Focus Axis forCell Imaging

• Resolution from 10nm to 100nm
• Spring counter-balance for optics
• Anti-migration crossed rollers for vertical
  operation
• Available with a variety of motor sizes

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Single Molecular Sequencing

• Developing a new machine for decoding Human
  Genome in days (DNA Sequencing)
• Using Auto Focus Z axis and XY with Nanomotion

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Surgical Arm Robot

• A surgical robotic system will be 2 robotic arms,
  each with 6 degrees of freedom for extra
  intra-cranial functions (ultimately for spinal
  surgery)
• Designed to perform
• soft tissue manipulation
• needle insertion
• blunt dissection
• Suturing
• grasping of tissue
• Cauterizing, Cutting, Manipulation of retractor
• Suction irrigation

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Biomedical Device Applications

• MRI Process (with non-magnetic motors
• Robotic arm for micro surgery of the brain
• MRI breast biopsy
• Other diagnostic tools
• Analytical instruments for Blood Glucose
  measurement. (eye or skin)

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MRI Probes
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Multi-Axis Motion PlatformsFor
Microfluidics/Proteomics
http//www.nanostream.com/products/hardware/CL_sys
tem.html

• Travel Unlimited (typically up to 600mm X/Y/Z)
• Speeds to 300mm/sec
• Reduced form-factor for table top machines
• Built-in holding braking.

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Biomedical /Pharmaceutical

• Long Travel Actuation (Travel to 4 meters)
• Inspection Device
• Pick Place assemblies

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Biomedical /Pharmaceutical

• Flow Cytometry
• Medical Robot (end of arm tooling / grippers)
• Dispensing
• Pumps

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Semicon Application Base

• Ebeam /Ion Beam wafer processing
• Material Spectroscopy
• Mask correction machines
• Surface analysis equipment
• Wafer inspection, processing, and packaging
• Hard disk drive certification
• Other storage media

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Nanomotion Solution
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MEMs Multi Axis Stage

• 4 Axis (X/Y/Z/T)
• Vacuum Rated
• Low Magnetic Field
• (VN motors, SS Bearings)
• Spring Counterbalance in Z
• Resolution of 100nm (available to 10nm)

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(13) Axis ST MotorsNanotechnology tool
Scanning Electron Microscope Motion Platform in
the palm of your hands
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(24) ST Motors on custom tool Closed loop XYZ
assembly
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Semiconductor / Electronics

• E-Beam writing inspection
• Wafer Metrology
• Thin Film Measurement
• Head Testing
• Storage Media testing/ writing

Aperture control in FIB Column Vacuum
Non-Magnetic 10mm travel X Y
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3D X-Ray Microscope

• Non-destructive imaging of internal structures
• Looking at sub-30nm defect features
• Fully automated, replacing labor intensive cross
  sectioning.

Custom Motion Platform Linear and Rotary axes All
standard motors
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Disk Media Testing

• Hard Disk Certification
• 2000 Tracks per hour
• Moves 1 to 15 um in 5msec settle to 100nm.
• Inspection rates increase to 3000 and 4000 tracks
  per hour next year

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Scan and Step
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7 Axis SEM Motion Platform

• X Axis
• Tilt Axis
• Y Axis
• Rotary Axis ( 3 point leveling)
• Uses round bodied motor
• Bottom axis moves 65kg
• All motors vacuum/non-magnetic

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Unique Solution Configurations

• Smallest available footprint.
• Can use smaller encoder
• IC alignment tool with ST motor.
• Position against two reference surfaces and
  adjust angle of IC

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Aerospace Application Base

• Space Vehicles
• Spectrometers
• Sensors

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UHV Motors reduce platform size
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Photonics / Fiber Optics

• Component Mfg
• Fiber alignment attach
• MEMs
• Tunable (Active) Devices
• Linear Rotary Switches

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Industrial Vision Applications

• Industrial vision market is a growth market for
  small motors.
• Zoom Auto Focus requirements are driving the
  need for smaller motors and electronics with
  increased precision.
• As many of these systems move on motion platforms
  weight and size are important design criteria

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Non-ConsumerVision Applications

• Industrial Vision Applications for
• Security identification
• Medical imaging
• Part inspection

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QA

• Questions
• Application Discussion