Channel Plate and Its Applications

1
Channel Plate and Its Applications

• Kan-Lin Hsueh
• MRL/ITRI

2
Micro-Channel Plate is

• A silicon or a glass disk
• Millions of high aspect ratio channels

3
Outline

• How it was/will be used
• How does it made of
• Electroforming of micro-wires

4
Outline

• How it was/will be used
• How does it made of
• Electroforming of micro-wires

5
It was used as an electron-multiplier

• One incident electron produces multiple secondary
  electrons
• Multiples the electron signal thousand/million
  times

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The e-multiplier was used for

• Night vision, imaging intensification
• Imaging ion mass spectrometry

Photon/electron converter
Channel Plate
P screen
photon
7
How to Make Micro-Channel Plate

• The old way since 1960
• glass micro-channel plate
• The new era, 1980 - 1990
• silicon micro-channel plate
• aluminum nano-channel plate

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Glass Micro-channel plate

• Glass monofiber draw
• Multifiber draw
• Billet slice, grind, and polish
• Chemical etching

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Making of Silicon Micro-Channel Plate (I)

• Front surface patterning
• Back contact
• Electrochemical etching

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Making of Silicon Micro-Channel Plate (II)

• Back polishing/etching
• SiO2 Conversion
• CVD coating/electrical contact

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Electrochemical Etching of Silicon Wafer

• Key Factor
• current distribution inside wafer
• electrochemical and chemical reaction on the
  solution/wafer interface

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Current Distribution in MCP
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Background Electrochemical Process inside the
Channel
Electrochemical Reaction at Solution/silicon
Interface
Diffusion of Chemicals
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Reactions at Solution/Wafer Interface
Si ? Si4 4 e-
Si4 6 F- ? SiF6-2
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Cross Section View of MCP
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Planar View of MCP
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MCP at High Etching Current
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MCP at High Etching Current
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MCP at Polishing Current
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Outline

• How it was/will be used
• Micro-channel plate was made from
• Front lithography/back Ohmic contact
• Electrochemical etching
• Back etching/polishing
• CVD coating/electrical contact
• Electroforming of micro-wires

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Outline

• How it was/will be used
• How does made of
• Electroforming of micro-wires

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Application of Nickel Micro-Wire/Co-Axial Cable
Power Line
Coaxial cable
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Making of Micro-CoAxial Cable

• Electroless plating of nickel
• Coating of silicon oxide
• Electroforming of nickel

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Planar View of Micro-wire
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Planar View of Micro-wire
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Planar View of Micro-wire
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Summary of Micro-Channel Plate

• Application
• It was used for e-multiplier for imaging
  detection
• It can be used as a capillary column for
  miniature GC
• Substrate of Chemical sensor
• Fabrication Process
• Lithiography, electrochemical etching, CVD process

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Summary of Micro-channel Plate

• Electroforming of Micro-wire
• Potential use for through wafer power line and
  coaxial signal line
• Nano-channel and wire
• Can be fabricated with similar process

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Au Nanodot array on Si
Hideki Masuda and Masahiro Satoh, Japan Journal
of Apply Physics, vol. 35, (1996) L126
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Preparation of a Pt-Ru bimetallic supported on
carbon nanotube
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Inclusion of Crystalline Iron Oxide Nanoparticles
in Uniform Carbon Nanotubes Prepared by a
Template Carbonization Method
B.K. Pradhan, T. Toba, T. Kyotani, and A. Tomita,
Chem. Mater., 10 (1998) 2510
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AFM lithography in constant current mode
Pattern making
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AFM lithography in constant current mode
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Electrochemically assembled quasi-periodic
quantum dot arrays
Evaporating Al on substrate, Si
Electropolished in perchloric acid, ethanol,
butyl cellusolve, and distill water.
S. Bandyopadhyay, A.E. Miller, H.C. Chang, and G.
Banerjee, Nanotachnology, 7 (1996) 360
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Electropolishing of aluminum
S. Bandyopadhyay, A.E. Miller, H.C. Chang, and G.
Banerjee, Nanotachnology, 7 (1996) 360
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Formation of nano-porous film
S. Bandyopadhyay, A.E. Miller, H.C. Chang, and G.
Banerjee, Nanotachnology, 7 (1996) 360
37
Modeling of pore formation
S. Bandyopadhyay, A.E. Miller, H.C. Chang, and G.
Banerjee, Nanotachnology, 7 (1996) 360