Advanced Technological Education in Semiconductor Manufacturing

1
Advanced Technological EducationinSemiconductor
Manufacturing

• Third Annual Conference

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Advanced Technological EducationinSemiconductor
Manufacturing

• Craig R Barrett
• President and Chief Operating Officer
• Intel Corporation
• 30, July 1997

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I think there is a world market for maybe five
computers. Thomas Watson, Chairman
of IBM, 1943
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PC Sales to Exceed TV
Worldwide Shipments
MU
140
TV's
120
PC's
100
80
Australia Canada Denmark Finland Korea
Norway Sweden Switzerland United States United
Kingdom
60
40
20
0
94
95
96
97
98
99
00
Source Dataquest, EIAJ, Warren Publishing
5
China 1997
6
Faster, Steeper, Cheaper
MU
Pentium Pro Pentium II Processors
Pentium Processor
i486 Processor
i386 Processor
286 Processor
85
86
87
88
89
90
91
92
93
94
95
96
97
98
99
Projected
Source Intel
7
Process Technology
Silicon Process Technology
1.5µ
1.0µ
0.8µ
0.6µ
0.35µ
0.25µ
Intel386 DX Processor
Intel486 DX Processor
Pentium Processor
Pentium Pro Pentium II Processors
8
Average Transistor Price per Year

100
10
1
0.1
0.01
0.001
0.0001
0.00001
0.000001
1968
1970
1972
1974
1976
1978
1980
1982
1984
1986
1988
1990
1992
1994
1996
Source Dataquest/Intel
9
Technology Challenges Looking Forward . . .
10
Technology Needs

• Lithography
• Interconnect
• Voltage scaling
• Oxide thickness

11
0.18m Transistor Cross-Section
TiSi2
Polysilicon
Si3N4
TiSi2
0.18 mm
12
193nm Challenges
Imaging with 193nm MicroStepper

• Optical materials and lens design
• Resist materials
• Exposure tools

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Challenges Beyond 193nm

• CD control
• Shorter optical wavelengths exist, but . . .
• EUV (l11-13nm)
• E-Beam lithography
• Proximity X-ray

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Delay Trends
Delay (psec)
1000
100
Transistor
10
Metal 2 (2mm)
1
1.5
1
0.8
0.6
0.35
0.25
0.18
0.1
Technology Generation (µ)
Source Intel
15
Interconnect Cross-Section Five Layer Metal
M5
M4
M3
M2
M1
Tungsten plugs
16
Minimum Insulator Thickness
Oxide Thickness (Angstrom)
1000
100
10
Minimum Feature Size (Micron)
Source C. A. Mead
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There Are Real Limits . . .
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Wafers
12
8
2
1971
Today
Future
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The Original Moores Law Plot
Electronics, April 1965
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Using Moores Law to project forward to 2011 . . .
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Transistor Count
1 Billion Transistors
K
1,000,000
100,000
10,000
Pentium Pro Processor
Pentium Processor
1,000
i486
i386
100
80286
8086
10
1
1975
1980
1985
1990
1995
2000
2005
2010
2015
Projected
Source Intel
22
Frequency On the Rise
MHz
100,000
10 GHz
10,000
1,000
Pentium Pro Processor
100
Pentium Processor
i486 Processor
10
i386 Processor
80286
8086
1
0.1
75
80
85
90
95
00
05
10
15
Projected
Source Intel
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Performance
MIPS
1,000,000
100,000 MIPS
100,000
10,000
1,000
Pentium Pro Processor
100
Pentium Processor
i486 Processor
10
i386 Processor
80286
1
8086
0.1
75
80
85
90
95
00
05
10
15
Projected
Source Intel
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Summary

• Moores Law continues to drive transistor density
• Process technology complexity increases good
  for five more generations
• Cost/area of processed silicon poses new
  challenges
• Better design, higher yields, larger wafer size
  higher throughput all contribute to reducing cost
• Base skill level needs to increase

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