???(epitaxial layer)???(substrate)?????????????????????????

1
?????? ?3??

• ?????
• ???
• ????
• ??????????????
• ????(??????????????????)
• ??(??????????????????????????????????????)

2
?????

• ????
• ???????
• ?????
• ????????????

3
?????????????
????
1?????
4
???????????

• ???(epitaxial layer)???(substrate)????????????????
  ?????????
• epi ?sub?????(homo-epitaxy)
• ?GaAs/GaAs, GaP/GaP, Si/Si
• ??????
• epi?sub?????(hetero-epitaxy)
• ?InGaAs/GaAs, GaN/Al2O3, SiGe/Si
• ????

5
?????????????????

• ??????
• ???????????????
• ??
• ????????????????
• ???????????????????
• ????1?????(??????????2??)

6
??????????????????
??? (10mm)
?? (500mm)
????????? ??? ?? ?? ????
?????????
???????????????????????
7
1?????
aepi gt asub
epi.
aepi
??????? ?????????
sub.
asub
epi.
aepi lt asub
aepi
????????? ???????
sub.
asub
8
???????????(??????????)
?????
GaAs InP
aRTÅ 5.6533 5.8687
aK-1 6.910-6 4.510-6
9
???????????(??????)
????
????
???
10
???????????(???????????????)
????
????
???
11
???????????(???????????????)
12
????

• 3????
• ??(dislocation)
• ????

13
3????
2???? ???????????
3???? ???????????????????????????????
14
3????????????
InAs/GaAs
InAs
GaAs
?????? eV
???
InAs??????
GaAs InAs
????Å 5.653 6.06
15
3?????????????????
1ML
2ML
AFM?
100Å
??TEM?
16
??(dislocation)
extra half plane
??????? (?????)
??????? (??????)

• ???????????????????????
• ????

17
????(edge dislocation)??????(screw dislocaton)
????
?????
??????????????
??????????????
18
???????????????
SiC
19
????

• A??????????
• B?????????

20
??????????????
??????
??????
21
????

• ??????
• ABCABCABCABC
• ??????
• ABABABABABABAB
• ?????????
• ABCABCBCABCABCBABC
• ABCABCABCABCABCABC

22
???????????

• ????????????
• ?????????????????

23
??????????(???)
???? GaAs 5.653Å InAs 6.07Å 7??????
InAs
GaAs
???????????????
24
???????90??
25
?????????
A
A
A

1. ???????????????????????
2. ??????????????
3. ???????????????

???
?????????????????????????
26
????

• ????????????????
• ?????????????????????

??????????
??????????????
????(critical thickness) ?????????
27
??????????

• force balance model
• J.W. Matthews and A.E. Blakeslee, J.Crystal
  Growth 116, 118(1974)
• ??????????????????????????????????
• energy balance model
• R. People and J.C. Bean, Appl. Phys. Lett. 47,
  322(1985)
• ??????????????????????

28
??????
(hkl)???
a1???1/h, a2???1/k, a3???1/l, ??????3??????
a3
hkl????
r
a2
a1
????r??? r ??????
hkl???(hkl)????
29
?
(110)
(100)
(111)
(200)
(100)
(113)
30
??(???)???
?????? (hkl) hkl (hkl)??????????????
100 (100),(010),(001),
??????? hkl lthklgt lthklgt???????????????
lt100gt 100,010,001 ,
31
??????
?????3???????1????????
(1010), (1120), (0001),
??
??
????????????2????????3????????????
( h k -h-k l )
( h k l )
???????????
( h k l )
32
???
(111)????
?????? ????????????????
33
???
???
??????
??????
34
?????

• ????
• 3????
• ????
• ??(????????????????????)
• ?????
• ??????
• ?????
• ??????