IEEE ICRA'07 Digest Template

1
Simplectic Architectures for True Multi-axial
Accelerometers A Novel Application of PKMs
Philippe Cardou and Jorge AngelesDept. of
Mechanical Engineering, McGill University, Canada

• Novel architectures of parallel-kinematics-machine
  s for multi-axial accelerometers are proposed
• The single-, bi- and tri-axial accelerometers
  allow the measurement of 1, 2, and 3 components
  of point acceleration, respectively
• The biaxial accelerometer can be fabricated using
  proven micromachining processes
• The direct kinematics problems associated with
  all 3 types of accelerometers are linear

electrodes
thickness 0.3 mm
proof mass
10 mm
flexible beams
MEMS realization of the biaxial accelerometer