Precision Engineering Micro Engineering and Nano Technology An Overview

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Precision Engineering Micro Engineering and
Nano Technology An Overview

• Prof. C. Gajendran
• Director
• Central Manufacturing Technology Institute,
• Tumkur Road, Bangalore 560 022

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Central Manufacturing Technology Institute
Tumkur Road,Bangalore
Web www.cmti-india.org
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Current Themes in Manufacturing

• Flexible Automation -
• CNC machine tools, FMS, CIM and Factory
  Automation
• Ultra Precision Engineering-
• It is the result of synthesis of Metrology with
  Manufacturing
• Its application has lead to the evolution of many
  high-tech products like Computers,
  Electro-optical systems, Biomedical devices,
  consumer electronics

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Ultra Precision Engineering has lead to the
growth of...

• Aerospace industries
• Atomic Energy
• Defence Research and Production
• Biomedical Engineering
• Information Technology
• Communication Engineering
• Entertainment Electronics

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Ultra Precision Engineering benefits product
development through...

• Greater interchangeability
• High service life
• High reliability
• Better product quality
• Greater comfort to the users
• Low frictional losses
• Miniaturisation- leading to saving in raw
  material, energy conservation better
  environment

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In manufacture of Precision products, we use,

• High precision and Ultra precision machine tools
  like DTMs, Ultra precision grinding and lapping
  machines, High precision EDMs, Laser cutting
  machines
• Apart from human skill, the other important
  ingredients of precision manufacture are good
  metrology practices, controlled environmental
  conditions for temperature, Humidity, Vibrations
  and dust levels

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Conventional Precision Engg.

• High Precision Turning (Schaublin, Hardinge,
  Hambrug)
• Jig Boring (SIP, DIXI, Moore)
• High Precision Grinding (Studer, Kellenberger,
  Tripet)
• Lapping Super Finishing (Sufina, Nagel)

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Ultra Precision Engineering
Micro Engineering Components and assemblies of
very small size
Nano technology units of measurement is Nano
metres
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Micro Engineering is also known as

• Micro System Technology (MST)
• Micro Electro Mechanical Systems (MEMS) Technology

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MEMS relate to

• Devices and and machines of extremely small size
  comprising tiny but highly sophisticated elements
  that allow them to perform minute and complicated
  tasks
• They are invariably integrated with signal
  processing electronic circuitry
• They are not just assemblies of Micro-fabricated
  components-but they imply radically new concepts
  in their design and production processes.

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CMTI/PENT/PVS/MEMS-01
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Micro gear with an ant
CMTI/PENT/PVS/MEMS-01
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Miniaturisation 1 GB HDD (IBM)
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CMTI/PENT/PVS/MEMS-01
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Micro Engineering products find application
in..

• Watches
• Diving equipment
• Hand held pressure gauges
• Sports shoes (pressure sensors)
• Electronic fuel injectors
• Flow sensors
• Printer mechanisms Ink jet nozzles
• Sensors for condition monitoring of machinery

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Micro Engineering products find application
in..

• Scanning Tunneling Microscopes
• Atomic Force Microscopes
• Implantable smart pills
• Catheter based devices
• Prosthetic devices
• Micro surgical tools

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Examples of Micro Engineering devices

• Electro statically driven micro motors, Micro
  robots,
• Micro pumps, Micro Actuators, Micro gears,
• Accelerometers, Sensors, Transducers, Connectors
  etc.
• Micro and Remote Surgical tools
• Micro machine tools and Micro factories
• Their over all dimensions are in the order of a
  few mm

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Travels through 8mm diameter bent tube
inspecting micro cracks
Micro Machine for pipe inspection
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Micro Actuator with Optoelectric Device
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Micro robots with silicon gears and
motors Overall size 6 mm
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Comb drives
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Wobble Motors
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Piezoelectric Actuators
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Thermal Actuators
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Hydraulic Actuators
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Micro Engg - applications

• Medical instrumentation
• Environmental control
• Safety engineering
• Communication technologies
• Aerospace and Automobile Engineering
• Consumer Products

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MEMS used in automobile for monitoring for
various units like navigation system, Air
Conditioning system, Suspension system, throttle,
brake, fuel tank, air bag, crash sensor
CMTI/PENT/PVS/MEMS-01
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MEMS used in bio-medial field for monitoring for
various units like pacemaker, muscle stimulator,
bladder stimulator, Blood pressure,
musculosckeletal prosthesis, etc.
CMTI/PENT/PVS/MEMS-01
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MEMS Application in Intraluminal Diagnostics
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MEMS Application in Power Plant
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Micromachining Guide Lines

• Reduce Unit Removal (UR)
• Improve Equipment Precision

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Types of Micromachining Processes

• Material Removal by
• Mechanical Force
• Melting Vapourisation
• Ablation
• Dissolution
• Plastic Deformation
• Solidification
• Lamination (Stereolithography)
• Recomposition

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Micro Components by Microcutting
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Micro Turn Mill Centre Drilling capacity ?100 ?m
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Micro Milling machine Drilling capacity ?30 ?m
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Microlap
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Micromachining Melting Vapourisation

• Electrical Discharge Machining (EDM)
• Laser Beam Machining (LBM)
• Electron Beam Machining (EBM) Deformation

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Wire EDM for Micro Machining
Submerged Cutting Threading Dual Measuring
System for X,Y axes Temperature Controlled
Dielectric
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Micro Components Machined on Wire EDM
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Micropin Fabricated by WEDG
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Silicon Microstructure Fabricated by EDM
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Micromachining Ablation

• When energy of laser beam exceeds binding energy
  atoms are removed form work piece (Excimer
  Lasers)
• When laser beam power is extremely high material
  is removed by vapourising skipping melting phase
  (Femto Second Lasers)

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Laser (Excimer) Micro Machining System
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Microslits Machined by FS laser
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Laser machined via holes 10 micron wide
3D structures
Microcomponents Machined with Excimer laser
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Micromachining Dissolution

• Chemical etching
• Wet Chemical etching
• Dry Chemical etching
• Bulk Machining
• Surface Micromachining
• Elecro Chemical etching (ECM)
• Photolithography
• LIGA Process

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CMTI/PENT/PVS/MEMS-01
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CMTI/PENT/PVS/MEMS-01
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CMTI/PENT/PVS/MEMS-01
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LIGA Process
LIGA- German acronym meaning Lithography
Electroplating and Injection Moulding
CMTI/PENT/PVS/MEMS-01
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LIGA Process- Examples
Micromotor ______________100 µm
Micro gripper constructed by Berkely Sensor
and Actuator Center with released Polysilicon
surface
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LIGA Process- Example
300 µm size structure of Micro gears made by
Sacrificial LIGA technique
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Micromachining Lamination
Microturbine Rotor - Stereolithography
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Micromachining Plastic Deformation
Lead Frame Produced by Micro Punching
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Micromachining Solidification
Micromould by EDM and Replica
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Nano Technology encompasses

• Nano Materials
• Nano Processes
• Nano Machining
• Nano Metrology

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Nanotechnology Tree
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Products of Nano Technology

• VLSI circuits
• Nano positioning systems
• Atomic Force Microscopes
• Scanning Tunnelling Microscopes
• Nano metrology instruments
• Nano lenses to focus light to a spot smaller than
  its wavelength

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Opportunities include

• Thin film deposition - Drug deliver systems, gene
  therapy etc.
• Energy storage
• Development nano-structured materials with
  improved mechanical properties
• Bio sensors

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Materials Used in Nano Technology...

• Optical Materials
• Self Assembling materials
• Longmuir Blodgett (LB) Films
• Liposomes
• Nano Tubes

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Manufacturing processes related to Nano
Technology

• Ultra precision Diamond turning and grinding
• Lapping, polishing
• Energy Beam Processes Electron Beam machining,
  Ion Beam Machining, Laser Ablation
• Lithography (Photo, UV, X-Ray, Electron Beam etc.)

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Manufacturing processes related to Nano
Technology

• Scanning Probe Microscopy
• Resistless Pattering by Evapouration
• Energy Beam Processes Electron Beam machining,
  Ion Beam Machining, Laser Ablation

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Nano Technology machines
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Schematic of Double Disc Grinding Machine (1 x0.5
m) for Super Flat Silicon wafer
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Tetraform for Grinding of Optical Components to 4
nm Surface Finish
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Molecular Measuring Machine
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Nano Technology Applications
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Nano Technology Applications
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Nano Technology Applications
Self assembly of Synthetic DNA for Electronic
Circuitry
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Nano Technology - Latest Trends

• Self Assembly
• Interfacing of Molecules

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Nano Metrology Instruments

• Scanning Probe Instruments
• Interference Microscopes
• Scanning Probe Microscopes
• Molecular Measuring machine

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Conics Aspherics
Range 1 mm Vertical Resolution up to 0.6
nm Accuracy for SF 2 nm Accuracy for Form 10
nm
Scanning Probe Instrument Form Taly Surf
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Interferometer for 3D Surface Mapping
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Scanning Probe Microscopes

• Scanning Tunnelling Microscope
• Atomic Force Microscope
• Magnetic Force Microscope
• Lateral Force Microscope
• Force Modulation Microscope
• Phase Detection Microscope
• Electrostatic Microscope
• Scanning Capacitance Microscope
• Thermal Scanning Microscope
• Near Field Scanning Optical Microscope

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Generalised Scanning Probe Microscopes
-Schematic
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Schematic of Tip and Sample Interaction in STM
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Comparison of Constant Height and Constant
Current Mode for STM
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Scanning Tunneling Microscope
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Inter Atomic Force Vs Distance Curve
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Beam Bounce Detection Scheme for AFM
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Atomic Force Microscope
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Magnetic Force Microscope (MFM) Mapping on
Sample Surface
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Lateral Force Microscope (LFM) Operating
Principle
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Principle of Force Modulation Microscope (FMM)
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Principle of Phase Detection Microscope (PDM)
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Principle of Electrostatic Force Microscope (EFM)
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CMTI Initiatives in Precision Engineering
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Precision Engineering Centre at CMTI
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Environmental conditions of the Precision
Engineering Centre at CMTI
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• CMTIs Activities
• in Micro Engg Nano Technology
• Micro Machining
• Manufacture of Ultrasonic Test Blocks
• Manufacture of Thin Rod and Button
• Manufacturing of Micro Gauges
• Manufacture Connectors
• Manufacture of Acoustic Sensors
• Micro Measurements
• Measurement of Micro Gauges (Dia 100nm)
• Calibration of SR Masters
• Calibration of Form Masters

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Diamond Turning Machine Developed at CMTI
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Mirror being machined on DTM
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Mirrors Machined on DTM
Surface Finish 5 to 10 nm
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Polygon Mirror
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Ultrasonic Standard Reference Blocks
?0.5 x 8 mm deep Flat Bottom Hole Flatness 5 ?m
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Ultrasonic Test Reference Master
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Master Sphere
Sphericity 60 nanometer
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Thin Rod for Hydrodynamic Bearing
Sphericity 0.5?m dia control ? 0.5?m Surface
finish 15 nm
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Button for Hydrodynamic Bearing
Sphericity 0.5?m dia control ? 0.5?m Surface
finish 30 nm
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Flexure
Groves must be concentric to OD within 0.05
?m Thickness 300 ?m
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Bearing Housing
Concentricity 5 ?m Size Tolerance 10 ?m
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Micro Component for Radar
Dimension to be controlled 0.175mm
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Flexible Membrane Mirror Used in Astro
Applications
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Thickness 0.8 ?m
Analysis of Micro Mirror deformation pattern
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CMTI Future Plans in Micro EngineeringNano
Technology
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Sphere Lapping Machine
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Structure for Acoustic Sensor
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Development of Gyroscope
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• CMTIs Future Plans in Micro Engineering covers,
• Micro Machining Facility
• Micro measurement Facility
• Development of Micro positioning Stages
• Development of Micro Structures
• Development of Packaging Tech for MEMS
• Development of Sensors Sensor Technology

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CMTIs Future Plans in Nano Technology Covers

• Sphere Lapping Machine
• Aspherical Grinding Machine
• Nano Positioning Systems
• Non Contact Nano Measuring Machines

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Work on various facets of Nano Technology are
going on at

• IIT- Chennai
• IIT- Kharagpur
• IIT - Mumbai
• IISc, Bangalore
• Aerospace and Defence laboratories
• Precision Engineering centre, CMTI, Bangalore

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Prominent Personalities In Micro Engg Nano
Technology

• Prof. Nario Taniguchi introduced the term Nano
  Technology
• Dr. Richard Feyman, a Nobel Laureate, first
  enunciated the concept of Nano Technology
• Mr. Evic Drexrea, known for Molecular Nano
  Technology

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Prominent Personalities In Micro Engg Nano
Technology

• Prof. P.A. Mckeown, CUPE, UK
• Prof. T. Moriwaki, Kobe Univ., Japan
• Prof. D. Chetwynd, Univ. of Warwick, UK
• Prof. H. Kunzmann, PTB, Germany
• Prof. R.J. Hocken, UNCC, Charlotte, USA
• Prof. D.J. Whitehouse, Univ. of Warwick, UK
• Prof. E. Brinksmeier, Univ. of Bremen, Germany
• Prof. Lim Gnian Cher, SIMT, Singapore

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We do look forward to your sustained interest
and interaction with us!
THANK YOU!
Visit us at website www.cmti-india.org