HMX- 2000

1
Humidity Sensors Tests for F-Pixel L. Cremaldi
3-25-04

• HMX- 2000
• Silicon micromachined piezoresistive humidity
  sensing chip based on shear stress hygrometry for
  direct measurement of relative vapor pressure.
• A dab of polymer flexes a modified strain gauge
  in reponse to humidity changes.
• HMX2000 die begins at 15.00 each for
  quantities up to 1,000 units.
• Reported to be radiation hard.
• Testing Warm/Cold response near RH0 against a
• Honeywell HIH-3610 humidity sensor before and
• after radiation.
• Detection of FC72 Leak ??

HMX2000 DIE
2
COOL DOWN
FC72 LEAK
H2O LEAK
3

• SUMMARY
• HMX Sensor responding as advertised.
• Tracking well with HIH sensor TgtoC.
• Possible sensitivity to FC72.
• Test board and Radiation Tests Envisioned.
• DCU Readout or Direct??