12.4 MOS Transistor Matching

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12.4 MOS Transistor Matching

• Analog Circuits use matched transistors ! Where
  ?
• Differential pairs want voltage matching on VGS
• Current mirrors want current matching
• etc.

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12.4 MOS Transistor Matching
MOS transistors can be optimized either for
voltage matching or for current matching, but
not for both !
gt Why ?
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• (1)Voltage matching
• Suppose two transistors, M1 and M2, operate at
  equal drain currents.
• Then, the possible voltage mismatch
• OFFSET Voltage DVGS DVt Vgst (Dk/2k2)
• To minimize DVGS
• use large W/L and low operating currents.
• minimize Vgst Vgst 0.1 volts or less.

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(2) Current matching The mismatch between ID1
and ID2 ID2/ID1 k2/k1 (1 2DVt/Vgst) DId
/ Id Dk/k 2DVt/Vgst ? To optimize ? use
reasonably large Vgst Vgst 0.3 V or more !
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So, Vgst 0.1 V or less for voltage matching and
Vgst 0.3 V or more for current
matching. Next is the effect of geometric
factors on the matching !
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• Geometric Effects on Matching.
• Increased Gate Area minimizes impact of local
  fluctuations ? Large transistors match more
  precisely.
• Longer channels reduce linewidth variations and
  channel length modulation ? Long-channel
  transistors match more precisely.
• Orientation of MOSFET matters.
• ? Gate Area, Oxide thickness, Channel length
  modulation, Orientation,

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• (1)Gate Area
• Vt mismatch SVt standard deviation
• SVt CVt / (Weff Leff)1/2
• Where CVt constant.
• Only applies to carefully laid out MOS for
  optimal matching.
• Leff, Weff ? Ld, Wd if they are several times
  greater than minimum.

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• (1)Gate Area
• k-mismatch Sk standard deviation in device
  transconductance.
• Sk / k Ck / (Weff Leff)1/2
• Where Ck constant.
• Linewidth variation
• Gate oxide roughness
• Statistical variation in mobility

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(2)Gate Oxide Thickness Scaling down to thinner
oxide ? seems to improve Vt-matching. ? not
affected is k-matching.
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• (3)Channel-length Modulation
• Short-channel MOSFETs ? severe mismatch in L if
  different VDS !
• Mismatch DVDS / L
• Notes
• Ld 15-25 mm, adequate for noncritical use such
  as current distribution network.
• Matched transistors at similar VDS ?
  Cascoding improves precision in matching.

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• (4) Orientation
• Several mismatch error
• Si wafer is under stress due to processing.
• The stress produces anisotropic effect on the
  carrier mobility, etc.
• Different orientation ? different stress effect
  on the transconductance

• Stress-induced mobility variation ? several
• For example, tilted wafer ? as much as 5 in
  matching errors.

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(4) Orientation

• Layout Editing
• Be careful with Cell editing when the matched
  transistors belong in different cells !
• Group matched devices into the same cell
• May be more difficult to understand in the
  Schematics
• But safer for the matching !

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(4) Orientation

• Mirror-image layout vs. Superimposable layout
• Mask misalignment ? same effect on
  superimposable but oppositie effect on
  mirror-image.
• So, be careful on asymmetric devices such as
  Extended Drain MOS.

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• Diffusion and Etch effects on Matching
• (1) Effects of Poly Gate etching
• Consider the mask-step of defining Poly Gates
• Deposit Poly ? cover with oxide ? Mask pattern
  for opening ?
  remove Poly open region by etching
• Etch rate depends on the size of Opening
• Larger opening ? faster etch.

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• Diffusion and Etch effects on Matching
• (1) Effects of Poly Gate etching
• Consider the mask-step of defining Poly Gates
• Deposit Poly ? cover with oxide ? Mask pattern
  for opening ?
  remove Poly open region by etching
• Etch rate depends on the size of Opening
• Larger opening ? faster etch.

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Diffusion and Etch effects on Matching

• Dummy Gates need be electrically connected to
  prevent spurious signal.
• Best to connect Dummy Gates to the Backgate.

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• (3)Contacts over the Gate Poly
• Contacts in the active Gate region ? gross
  variations in Vt !
• Gate contacts must be outside the active region,
  on thick field-oxide.
• Probably because of grain size, work function,
  dopants, stress,

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• (3)Contacts over the Gate Poly
• Contacts in the active Gate region ? gross
  variations in Vt !
• Gate contacts must be outside the active region,
  on thick field-oxide.
• Probably because of grain size, work function,
  dopants, stress,
• Annular MOSFETs ? particularly problem with gate
  contatcs
• Use Annular Transistors for Matched Devices only
  if absolutely necessary. ? Make sure they use
  identical arrangements, and minimal
  number of small contacts.

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• (4) Diffusions near the Channel
• Deep Diffusions (e.g., deep-N sinker, Nwell, )
  ? diffusion tails extend much farther than
  the junctions.
• Spacing BETWEEN Matched Channels AND Deep
  diffusion boundaries ? must be 2 times the
  Junction Depth !

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• (4) Diffusions near the Channel
• Deep Diffusions (e.g., deep-N sinker, Nwell, )
  ? diffusion tails extend much farther than
  the junctions.
• Spacing BETWEEN Matched Channels AND Deep
  diffusion boundaries ? must be 2 times the
  Junction Depth !
• Spacing BETEEN Active Gate regions (of matched
  transistor) AND the edge of the nearest NBL
  region ? at least 150 of the epi
  thickness.

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• Common-Centroid Layout of MOS Transistors
• Consider a MOS transistor with a couple of Gate
  fingers.
• Then consider matching two such transistors.

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• Common-Centroid Layout of MOS Transistors
• Consider a MOS transistor with a couple of Gate
  fingers.
• Then consider matching two such transistors.

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• Common-Centroid Layout of MOS Transistors
• Consider a MOS transistor with a couple of Gate
  fingers.
• Then consider matching two such transistors.

The MOS pair A B B A
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• Common-Centroid Layout of MOS Transistors
• Consider a MOS transistor with a couple of Gate
  fingers.
• Then consider matching two such transistors.

The MOS pair A B B A
Use S, D as subscripts ? DASBDBSAD
A
B
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Define Chirality of a Transistor Chirality
(the fraction of right-oriented segments)
(the fraction of left-oriented segements)
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Define Chirality of a Transistor Chirality
(the fraction of right-oriented segments)
(the fraction of left-oriented
segements) Examples) Three right-oriented and
One left-oriented segements ¾ - ¼ ½ Nine
right-oriented and Three left-oriented segements
9/12 3/12 ½ ? they can be matched
together w/o worry of orientation-dependent
mismatch.
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Example of Orientation-Dependent
Mismatch TILTED IMPLANTS
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Example of Orientation-Dependent
Mismatch TILTED IMPLANTS
Consider matching two transistors A and
B DASBD
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Rules of Common-Centroid Layout
1. Coincidence 2. Symmetry 3. Dispersion
4. Compactness 5. Orientation
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Rules of Common-Centroid Layout
1. Coincidence The centroids of the matched
devices must at least approximately
coincide 2. Symmetry The array should be
symmetric wrt both X- and Y-axes. 3.
Dispersion The segments of each device should
be distributed throughout the array as
uniformly as possible. 4. Compactness The array
should be as compact as possible. Ideally,
nearly square. 5. Orientation matched device
should possess equal Chirality.
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Simple Interdigitation Patterns for MOS
Transistor
1. (SADA)(SBDBSBDB)(SADA)S AB 11 2.
(DASBD-DBSAD)-(DASBD-DBSAD) 3. (DASBDBSA)D 4.
(SADASBDB)S(BDBSADAS) 5. (SADASBDBSADA)S
AB 21 6. (SADASBD-SADAS-DBSADA)S
AB 31 7. (SADASBDBSCDC)S(CDCSBDBSADAS) A
BC 111