Title: LHCB
1The University of Liverpool
Functionality of cleanrooms with respect to
maintaining acceptable levels of particulate
counts within the facility, and management of
temperature and humidity within the C100 and
C10000 areas
2The University of Liverpool
Brief overview of cleanroom hvac and bms control
layout
3Cleanroom plant area
4Cleanroom plant area
5Cleanroom plant area
6Cleanroom plant area
7Particle monitoring system
8Cleanroom BMS controls
9The University of Liverpool
- Cleanroom particle counts 0.5 microns / cu ft
for C100 and C10000 areas May to July 2006
10May particle counts C100 area
11May particle counts C10000 area
12June particle counts C100 area
13June particle counts C10000 area
14July particle counts C100 area
15July particle counts C10000 area
16The University of Liverpool
- Cleanroom extract temperature and Rh values
within the C100 and C10000 areas Jan Oct 2006
17Jan-Oct C100 area room temp
18Jan-Oct C10000 area room temp
19Jan-Oct C100 area Rh values
20Jan-Oct C10000 area Rh values