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Simulated Mars dust

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CNT tip is robust, offers amazing resolution. 2 nm thick Au on Mica. MWNT Scanning Probe ... DNA. PROTEIN. High Resolution Imaging of. Biological Materials ... – PowerPoint PPT presentation

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Title: Simulated Mars dust


1
CNT in Microscopy
Atomic Force Microscopy is a powerful technique
for imaging, nanomanipulation, as platform for
sensor work, nanolithography... Conventional
silicon or tungsten tips wear out quickly. CNT
tip is robust, offers amazing resolution.
Simulated Mars dust
2 nm thick Au on Mica
2
MWNT Scanning Probe
3
Profilometry in Integrated Circuit Manufacturing
280 nm line/space. Array of polymeric resist on
a silicon substrate.
MWNT Probe
Conventional Si Pyramidal Cantilever
Nguyen et al., Nanotechnology, 12, 363 (2001).
4
AFM Image with a MWNT Tip 193 nm IBM Version 2
Resist
5
AFM Image with MWNT Tip
DUV Photoresist Patterns Generated by
Interferometric Lithography
Nguyen et al., App. Phys. Lett., 81, 5, p. 901
(2002).
6
AFM Imaging with Single Wall Nanotube Tips
2 nm thick Au on Mica
Si3N4 on Silicon substrate
Nguyen et al., Nanotechnology, 12, 363 (2001).
5 nm thick Ir on Mica
7
High Resolution Imaging of Biological Materials
DNA
PROTEIN
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