EFEM- Reputation for Leadership in Robotic Technology

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EFEM

• Reputation for Leadership in Robotic Technology

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About

• Performix is backed by Kensington Laboratories
  reputation for high quality design and high
  performance technology. With a large installed
  base of robots and systems, Kensington
  Laboratories Performix sub-systems ensure faster
  start-up times and improved placement accuracies,
  in an ISO Class 1 mini-environment. Based upon a
  history of cutting-edge system design, Performix
  integrates the highest quality components to
  achieve performance unrivaled in the marketplace.

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Configurable Solutions

• Flexible load port and robotic components
  designed for configurable solutions allow
  Performix to be easily tailored to a variety of
  automation requirements. Features that make the
  Performix EFEM configurable to your specific
  needs include
• ADO load port with or without wafer mapping
  option.
• Multilink Dual Arm (4 axes of motion) and
  MultiLink Single Arm (3 and 4 axes of motion)
  robots.
• End effector options 300mm edge grip, 300mm
  vacuum grip, 300mm supinator wafer flipper, and
  300mm batch edge grip all with through-beam
  wafer mapper. The integrated through-beam wafer
  mapper uses an eye safe LED that optically maps
  the entire FOUP and detects common storage
  errors.
• Yaw axis robots (trackless) or Track
  configurations.

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Specifications
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CONTACT US

• Sales  Kensington Robots Stages, Newport PM500
  Stages, Spare Parts
• sales_at_kensingtonlabs.com
• Service - Kensington robot and stage repairs,
  Newport PM500 stage repairs
• service_at_kensingtonlabs.com

Kensington Laboratories, LLC 6200 Village
Parkway Dublin , CA 94568 Phone
510.324.0126 Fax [phone] www.kensingtonlabs.
com
Our Toll Free Number 1-888-977-7800