[e-mail]

1
3D Nanostructures Group Prof. Dr.
Yong Lei
yong.lei_at_tu-ilmenau.de

• Introduction
• Surface nano-patterning has been intensively
  investigated due to the wide applications in
  fabricating different nano-devices. There are
  fabrication and application restrictions for
  existing surface patterning techniques (EBL,
  self-assembly, SPM, and imprinting).
• Therefore, the realization of a new surface
  nano-patterning with a process characterized by
  flexibility, high throughput, low cost and high
  structural controllability presents an important
  issue.
• Recently, using a novel surface nano-patterning
  technique the UTAM (ultra-thin alumina masks)
  surface nano-patterning, large-scale ordered
  arrays of surface nano-structures (nanodots,
  nanoholes, nanowires, and nanotubes) were
  fabricated 1-6.

Result and Discussion
1. IDK ZnO(ALD)
2. UTAM ZnO(ALD)
3. Attached UTAM ZnO(ALD)
4. Connected UTAM ZnO(ALD, On-chip grown)
5. Conclusion and future work
Ultrathin alumina membranes for surface
nanopatterning in fabricating quantum-sized
nanodots 3
References 1. Lei Y., et al., Chem. Soc. Rev.,
40, 1247-1258 (2011). 2. Lei Y., Cai W.P., Wilde
G., Prog. Mater. Sci., 52, 465-539 (2007). 3. Wu
M.H., Wen L.Y., Lei Y., et al., Small, 6, 695-699
(2010). 4. Lei Y., Chim W.K., Chem. Mater., 17,
580 (2005). 5. Lei Y., Chim W.K., J. Am. Chem.
Soc., 127, 1487 (2005). 6. Lei Y., Chim W.K., Sun
H.P., Wilde G., Appl. Phys. Lett., 86, 103106
(2005).