Microfluidic MEMS

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Microfluidic MEMS
System on a Chip
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Abstract
Capillary Electrophoresis (CE) systems are a
widely used chemical analysis system. To reduce
the size of CE systems state of the art
Microfluidic Micro-Electro-Mechanical Systems
will (MEMS) be employed. The Microfluidic MEMS
will be built using photolithography process and
thin films technology that are currently being
used in fabricating microelectronic devices. To
control the Microfluidic MEMS, a control system
will have to be developed. The control system
will have a computer interface to perform the
vast amount of switching that the Microfluidic
MEMS requires to pump the fluid.
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Team
Team Leader
Advisors
Dr. Charles S Henry email chenry_at_ra.msstate.edu A
ssistant Professor Department Of Chemistry
John Ivy email jri1_at_ece.msstate.edu Undergraduate
Research Assistant Senior Electrical Engineering
Team Members
Faculty Advisors
Dr. Stephen E. Saddow email saddow_at_ece.msstate.ed
u Assistant Professor Dept. of Electrical
Engineering
Luke Purvis email lkp1_at_ece.msstate.edu Senior
Electrical Engineering
Dr. Jeff Casady email casady_at_ece.msstate.edu Assi
stant Professor Dept. of Electrical Engineering
James Langford email jll1_at_ece.msstate.edu Undergr
aduate Research Assistant Senior Electrical
Engineering
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Motivation

• Solution
• Use MEMS technology
• Build MEMS in a batch process
• Interface with a PC

• Problem
• CE systems are large
• CE systems are expensive
• CE systems are complicated

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Requirements

• Maintain a low cost for the system
• The complete system will be no more than a cubic
  foot
• Reduce analysis time to around 3min. max
• Low power consumption
• Build durable MEMS
• Distinguishable peaks on a graph (current vs.
  time)

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Design of Microfluidic MEMS
1, 2, 3, 4, 5
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Electroosmotic Flow (EOF)
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Capillary Electrophoresis
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Building the Microfluidic MEMS

• Photolithography
• Electrodes and Channels

• Thinfilms technology
• Electrodes

• Polydimethylsiloxane (PDMS)
• Channels

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System Control

• PC Control

• Relays (Crydom DAT70510)

• E-Chem. Detector

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Complete System
Picture of working system
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Channels and Reservoirs
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T Injection
Before After
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Gateless Valve
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Output
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Future Improvements

• Construction and integration of the potentiostat
• Improvements on the power supply system
• Integration of chip components for a plug-in
  type system
• Integration of display electronics
• Integration of remote data transmission

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Future Improvements
The options for chemistry are endless. It depends
on what needs/wants to be done with the chip
system.
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References