300mm Single Arm Atmospheric Wafer Handling Robot - PowerPoint PPT Presentation

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300mm Single Arm Atmospheric Wafer Handling Robot

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300mm single arm atmospheric wafer handling robot, part of the Multilink robot family, is designed to meet the industry most rigorous 300mm performance standards. The Multilink Single Arm robot incorporates a host of unique, proprietary design features which combine to provide unsurpassed reliability, superior performance, and high throughput. – PowerPoint PPT presentation

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Title: 300mm Single Arm Atmospheric Wafer Handling Robot


1
300mm Single ArmAtmospheric Wafer Handling Robot
  • https//www.kensingtonlabs.com/

2
About us
  • Kensington Laboratories 300mm single arm
    atmospheric wafer handling robot, part of the
    Multilink robot family, is designed to meet the
    industrys most rigorous 300mm performance
    standards. The Multilink Single Arm robot
    incorporates a host of unique, proprietary design
    features which combine to provide unsurpassed
    reliability, superior performance, and high
    throughput. Kensington Laboratories, a leader in
    advanced robotics technology, is committed to
    developing and manufacturing the highest quality
    and most cost effective atmospheric robots in the
    industry.

3
Automated Self Teach
  • The patented Automated Self Teach feature reduces
    time required to bring systems online and
    provides faster time to production ramp.
  • High Throughput

Continuous rotation translates to short, discrete
theta moves less than 180 degrees, which
significantly increases throughput.
4
Accurate Wafer Placement
  • High performance design provides precise motion
    control and eliminates structural deflection and
    creep. All robot axes are guided by preloaded
    bearings mounted on monolithic frames machined
    from single ingots of highly stable
    aircraft-quality aluminum.
  • Precise Wafer Mapping

High performance through-beam wafer mapping
allows fast, accurate wafer detection.
5
High Reliability
  • The Multilink robot achieves industry-leading
    MCBF by employing direct-drive DC servo motors
    with real time force feedback and non-contacting
    glass scale encoders that monitor actual drive
    train output.
  • Zero Preventative Maintenance

Superior precision design requires no periodic
lubrication or adjustments under standard
operating conditions.
6
Cleanliness
  • Patented edge grip technology provides better
    than ISO Class 1 particle performance. In
    addition, the side-mounted Multilink robot,
    combined with Kensington Laboratories
    side-mounted Multilink robot track, maximizes the
    exhaust opening of the equipment front end module
    allowing uniform air flow from the fan filter
    unit through the perforated fab floor.

7
CONTACT US
  • Sales  Kensington Robots Stages, Newport PM500
    Stages, Spare Parts
  • sales_at_kensingtonlabs.com
  • Service - Kensington robot and stage repairs,
    Newport PM500 stage repairs
  • service_at_kensingtonlabs.com

Kensington Laboratories, LLC 6200 Village
Parkway Dublin , CA 94568 Phone
510.324.0126 Fax 510.324.0130 www.kensingtonlabs.
com
Our Toll Free Number 1-888-977-7800
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