PECVD

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????? ????? ???? ????? ????? - PECVD

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????? ????? DC
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Current to the anode
Where Ic is the electron Cathodic current
a-Townsand coefficient
l is the collision mean free path, E the electric
field, and Vi is the effective ionization
potential
Paschens law
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RF ?????
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?????? KeV
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????? ??? AC ?????? ?????
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????????? ????? (I)
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Magnetic enhancement
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????? ???????? ???? ( HCM )
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????? ????? ???? RIE
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????? ?????? ?????? ???? (HDP)
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??? ?????? ??????? ???? ?????? ?????? ?? ?-
PRECURSORS
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??????? ??? ???? ?????? HDP
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??????? HDP
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????? ?? ????? ????, ????? ???? ??? CVD ?????
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