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THE NEXUS TECHNOLOGY ROADMAP FOR
MICROSYSTEMS 1st Report issued in August
2000 The NEXUS Roadmap Task Group Helmut Zinner,
DaimlerChrysler/EADS (Roadmap Co-ordinator) Ayman
ElFatatry, BAE Systems (NEXUS Vice Chairman)
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Content
Roadmaps for selected MST applications

• technologies
• components
• infrastructure

• Benefits
• Strategic guidance for users, manufacturers,
  equipment suppliers
• Identify new research topics
• Assist funding authorities in defining the scope
  of new projects
• Assist partnerships for research projects

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Structure
Approach Application-oriented Baseline NEXUS
Market analysis (1998)
Multimed. Peripherals
(Bio-)Medic. (Bio-)Chem.
Instrument. Process Ctr.
Aerospace/ Aeronautics
Automotive
Household Appliances
Tele- communic.
Example
Communic./ Information
Comfort/ Conven.
Safety/ Security
Chassis/ Body
Power- train
...
...
...
MAP
Accel.
MAF
Gyro
Cyl. Press.
...
...
Generic Technologies CAD, Simulation,
Si-µ-Machining, LIGA, Thin Film, .....
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Methodology
Functional trends
1. Identification of functional trends and
requirements by the User-Supplier Clubs (USCs)
func. x
device x
Functionality/customer benefit
....
func. 2
device 1
2. Identification of relevant MST devices
func. 1
2000
2010
2005
Component trends
3. Forecast of device development trends
device x
technology x
....
Functionality/performance
device 2
technology 1
4. Technological developments necessary to
achieve the desired functionality
device 1
2005
2000
2010
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x-by-wire
3d imaging sensor long range (100 m)
3d imaging sensor short range (20 m)
Vision distance sensor
Functionality/customer benefit
spin off
night vision
Uncooled IR imager
lane departure warning
Optical (VIS) sensor
Example Automotive, active, safety systems
Distance sensor (mm, IR)
2005
2000
2010
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?
ferroelectr.
8002
25 µ
10 mK
?
Monolithic thin film depos. of ferroelectr.
Example Trends uncooled IR FPAs for night vision
2005
2000
2010
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EVOLUTION OF MOBILE SYSTEMS RELATED MST/MEMS
TECHNOLOGIES
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RF SYSTEMS
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OPTICAL SYSTEMS
System Capacity
Optical Routers
Enabling MEMS/MOEMS
Modulators Polarizers
Optical Cross- Connect OXC
Switches Amplifiers
Couplers WDM Alignment
Tera-bits/s
Optical add-drop MUX OADM
100 Giga-bits/s
Sensors Actuators Displays Mass-Storage
All-optical Systems
10 Giga-bits/s
WDM
SOLITON Systems
Giga-bits/s
Real-time images, video, simulation VR
2000
2002
2004
2006
2008
2010
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MEMS CAD road map
Process
Wafer assy
ICs simulator
simulator
cross section
MENTOR
3D viewer
Parameters
CADENCE, MEMSCAP
extraction
FEM ANSYS...
Global MEMS simulation platform
as offered by MEMSCAP
IPs
Gyros
Microtransfos
Accelerometers
Vibration
Pressure
Microswitches
Microswitches
Inductors
RLC filters
Tuneable capacitors
1999 2000 2001 2002
2003 2004
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Results of Phase I
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Cross-Fertilisation Matrix
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Conclusions

• Information for the Roadmaps is currently based
  on the present composition, expertise and
  intuition available from within the NEXUS USCs
  and Task Group
• Difficulty in obtaining information on component
  trends
• Significant differences between fields of
  application
• - production quantities
• - price per item
• - complexity/functionality
• - time scale of product / innovation cycle
• Little generic trends identified no
  standardisation - so far !
• The distinction between drivers followers is
  not too clear.